한국산업융합학회 논문집 (Journal of the Korean Society of Industry Convergence)
- 제10권4호
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- Pages.213-219
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- 2007
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- 1226-833X(pISSN)
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- 2765-5415(eISSN)
석영 유리의 파괴 거동에 관한 연구(II)
A Study on the Fracture Behavior of Quartz Glass(II)
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Choi, Seong-Dae
(School of Mechanical Engineering, K.I.T) ;
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Cheong, Seon-Hwan
(School of Mechanical Engineering, K.I.T) ;
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Kwon, Hyun-Kyu
(School of Mechanical Engineering, K.I.T) ;
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Jeong, Young-Kwan
(School of Mechanical Engineering, K.I.T) ;
- Hong, Yong-Bae (School of Mechanical Engineering, K.I.T)
- 투고 : 2007.07.10
- 심사 : 2007.11.23
- 발행 : 2007.11.30
초록
Glass-to-metal contact should be prevented in the design of any structural glass component. Because glass is extremely brittle and will fracture readily if even a small point load is applied. If the assembly includes a glass component supported by metallic structure, designers should provide a pliable interface of some kind between the two parts. But there happens high demand of glass-to metal contact in semiconductor industries due to adoption of dry cleaning process as one of the good solution to reduce running cost - carry out equipments cleaning with high corrosive and etching gas such as CF4 with keeping process temperature as the same as high service temperature. Therefore the quartz glass have to be received compression by direct contact with metal as the form of weight itself and vacuum pressure and fatigue by vibrations caused by process during the process. In this paper investigation will be carried out on fracture behavior of quartz glass contacted with metal directly under local load and fatigue given by process vibration with apparatus which can give
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