Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 6 Issue 4
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- Pages.17-22
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- 2007
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- 1738-2270(pISSN)
Development of Active Vibration Isolation Equipments Using Fuzzy Method
- Rim, Kyung-Hwa (KUT School of Mechatronics) ;
- Yang, Xun (KUT Graduate School) ;
- An, Chae-Hun (KUT Graduate School) ;
- Jin, Kyoung-Bog (KUT School of Mechatronics)
- Published : 2007.12.30
Abstract
Vibration isolation equipments are mostly required in precise measurement and manufacturing system. Among all the vibration isolation equipments, air-spring is the most widely used equipment because of low resonant frequency and high damping ratio. In this study, we used Takagi-Sugeno fuzzy method to design an active vibration isolation system using air-spring, and compared the fuzzy method with passive control method and PID control method. Due to the non-linearity characteristics of air-spring, fuzzy controller was verified to be the most effective both in simulation and experiment.
Keywords
- Active Vibration Isolation System;
- Air-spring;
- Fuzzy Logic Control;
- Takagi-Sugeno Method;
- PID Control