Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Design and Modeling of a 3-DOF Precision Stage for Vibration Isolation

제진을 위한 3 자유도 정밀 스테이지의 설계와 모델링

  • 문준희 (서울대학교 기계항공공학부 마이크로열시스템연구센터) ;
  • 김화수 (서울대학교 기계항공공학부 BK21 사업단) ;
  • 박희재 (서울대학교 기계항공공학부)
  • Published : 2007.03.01
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Abstract

Active vibration isolation systems need the following performance specifications which are different from those of existing positioning systems: usage of seismic sensors, strict suppression of phase lead/lag in signal processing for sensors and actuators, excellent control in low frequency range and so on. In consideration of such specifications, a 3-DOF precision stage for vibration isolation is designed and modeled based on the physical characteristics. Then the major parameters such as spring constants and damping coefficients are valued by the system identification method using empirical transfer function. Finite element analysis is used as a verification and simulation tool throughout this research. This paper lays the foundation for the future research on the control of the active vibration isolation system.

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References

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