Journal of Ocean Engineering and Technology (한국해양공학회지)

Korean Society of Ocean Engineers (한국해양공학회)
권호 표지

Mechanical Properties of ITO / Glass Thin Film by Indentation Method

나노인덴터에 의한 ITO / Glass 박막재의 기계적 특성

  • Yoon, Han-Ki (Department of Mechanical Engineering, Dong-Eui University) ;
  • Kim, Do-Hyoung (Department of Mechanical Engineering, Graduate School of Dong-Eui University) ;
  • Shin, Do-Hoon (Department of Mechanical Engineering, Tokushima University) ;
  • Murakami, Ri-Ichi (Department of Mechanical Engineering, Tokushima University)
  • 윤한기 (동의대학교 기계공학과) ;
  • 김도형 (동의대학교 대학원 기계공학과) ;
  • 신도훈 (토쿠시마대학 기계공학과) ;
  • Published : 2007.02.28
Download PDF
⟨ Previous Next ⟩

Abstract

The thin film of indium tin oxide (ITO) was prepared using the inclination opposite target type DC magnetron sputtering equipment onto the glass substrate at room temperature, using oxidized ITO with In2O3 and SnO2in a weight ratio of 9:1. The elastic modulus and hardness of the ITO thin films, prepared at different deposition conditions, were determined through anano-indentation experiment. The work pressure was varied from $2.6{\times}10-1\;to\;8.3{\times}10-1Pa$. The results show that the variation of work pressure during film deposition could vary significantly, according to the elastic modulus and hardness of the ITO thin films. It also can be seen that a minimum value exists in the film resistivity for the ITO thin films, prepared according to the variation of work pressure. However, the ITO film produced at room temperature had a microstructure in which a X ray diffraction peak is not clear, regardless of the work pressure.

Keywords

References

  1. 김도형, 윤한기, Shin D.H., Murakami, Ri-ichi (2005). 'PET에 성막된 ITO 박막재의 $O_2가스$ 분압비에 의한 광학적 및 전자파차폐 특성', 한국해양공학회 2005년도 추계학술대회논문집, pp 278-282
  2. 정헌채, 김동현, 윤한기, 임희섭, 유윤식 (2004). 'NI 법에 의한 기계적 특성에 미치는 ZnO 박막의 기판재의 영향', 한국해양공학회 2004년도 춘계학술대회 논문집, pp 342-346
  3. Han, J.H. (2002). 'Principal and Application of Nanoindentation Test', Journal of the KSME, Vol 42, No 11, pp 48-54
  4. Herbert, E.G., Pharr, G.M., Oliver, W.C., Lucas, B.N. and Hay, J.L. (2001). 'On the Measurement of Stress-Strain Curves by Spherical Indentation', Thin Solid Films, Vol 398-399, pp 331-335 https://doi.org/10.1016/S0040-6090(01)01439-0
  5. Hoshi, Y. and Kiyomura, T. (2002). 'ITO Thin Films Deposited at Low Temperatures Using a Kinetic Energy Controlled Sputter-Deposition Techique', Thin Solid Films, Vol 411, pp 36-41 https://doi.org/10.1016/S0040-6090(02)00170-0
  6. Minami, T., Sonohara, H., Kakumu, T. and Takata, S. (1995). 'Physics of Very Thin ITO Conducting Films with High Transparency Prepared by DC Magnetron Sputtering', Thin Solid Films, Vol 270, pp 37-42 https://doi.org/10.1016/0040-6090(95)06889-9
  7. Nunes de Carvalho, C., Lavareda, G., Fortunato, E. and Amaral, A. (2003). 'Properties of ITO Films Deposited by R.F.-PERTE on Unheated Polymer Substrates-Dependence on Oxygen Partial Pressure', Thin Solid Films, Vol 427, pp 215-218 https://doi.org/10.1016/S0040-6090(02)01213-0
  8. Shin, D.H., Murakami, R., Minamiguch, J. and Kim, Y.H. (2003), 'A study on the Deposition of ITO Films at Low temperature by Inclination Opposite Target type DC Magnetron Sputtering Method', International journal of Modem Physics B, Vol 17, No 8&9, pp 1229-1234 https://doi.org/10.1142/S021797920301879X
  9. Utsumi, K., Iigusa, H., Tokumaru, R., Song, P.K. and Shigesato, Y. (2003). 'Study on In2O3-SnO2 Transparent and Conductive Films Prepared by D.C. Sputtering Using High Density Ceramic Targets', Vol 445, pp 229-234
  10. Zeng, K., Zhu, F., Hu, J., Shen, L., Zhang, K. and Gong, H. (2003). 'Investigation of Mechanical Properties of Transparent Conducting Oxide Thin Films', Thin Solid Films, Vol 443, pp 60-65 https://doi.org/10.1016/S0040-6090(03)00915-5