JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Nanochannels for Manipulation of DNA Molecule using Various Fabrication Molecule

  • Hwang, M.T. (CIRMM/Institute of Industrial Science, The University of Tokyo) ;
  • Cho, Y.H. (CIRMM/Institute of Industrial Science, The University of Tokyo) ;
  • Lee, S.W. (CIRMM/Institute of Industrial Science, The University of Tokyo) ;
  • Takama, N. (CIRMM/Institute of Industrial Science, The University of Tokyo) ;
  • Fujii, T. (CIRMM/Institute of Industrial Science, The University of Tokyo) ;
  • Kim, B.J. (CIRMM/Institute of Industrial Science, The University of Tokyo)
  • Published : 2007.12.31
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Abstract

In this report, several fabrication techniques for the formation of various nanochannels (with $SiO_2$, Si, or Quartz) are introduced. Moreover, simple fabrication technique for generating $SiO_2$ nanochannels without nanolithography is presented. By using different nanochannels, the degree of stretching DNA molecule will be evaluated. Finally, we introduce a nanometer scale fluidic channel with electrodes on the sidewall of it, to detect and analyze single DNA molecule. The cross sectional shape of the nanotrench is V-groove, which was implemented by thermal oxidation. Electrodes were deposited through both sidewalls of nanotrench and the sealing of channel was done by covering thin poly-dimethiysiloxane (PDMS) polymer sheet.

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References

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