JSTS:Journal of Semiconductor Technology and Science

  • 제7권3호
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  • Pages.177-182
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  • 2007
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  • 1598-1657(pISSN)
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  • 2233-4866(eISSN)
대한전자공학회 (The Institute of Electronics and Information Engineers)
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See-saw Type RF MEMS Switch with Narrow Gap Vertical Comb

  • Kang, Sung-Chan (School of Electrical Engineering and Computer Sciences Seoul National University) ;
  • Moon, Sung-Soo (School of Electrical Engineering and Computer Sciences Seoul National University) ;
  • Kim, Hyeon-Cheol (School of Electrical Engineering and Computer Sciences Seoul National University) ;
  • Chun, Kuk-Jin (School of Electrical Engineering and Computer Sciences Seoul National University)
  • 발행 : 2007.09.30
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초록

This paper presents the see-saw type RF MEMS switch based on a single crystalline silicon structure with narrow gap vertical comb. Low actuation voltage and high isolation are key features to be solved in electrostatic RF MEMS switch design. Since these parameters in conventional parallel plate RF MEMS switch designs are in trade-off relationship, both requirements cannot be met simultaneously. In the vertical comb design, however, the actuation voltage is independent of the vertical separation distance between the contact electrodes. Therefore, the large separation gap between contact electrodes is implemented to achieve high isolation. We have designed and fabricated RF MEMS switch which has 46dB isolation at 5GHz, 0.9dB insertion loss at 5GHz and 40V actuation voltage.

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참고문헌

  1. Gabriel M. Rebeiz, Jeremy B. Muldavin, 'RF MEMS Switches and Switch Circuits,' IEEE Mircrowave Magazine, pp.59-71, December 2001
  2. Dimitrios Peroulis, Sergio P. Pacheco, Kamal Sarabandi, Linda P. B. Katehi, 'Electromecahnical Considerations in Developing Low-Voltage RF MEMS Switches,' IEEE Transactions on Microwave Theory and Techniques, Vol. 51, No. 1, pp. 259-270, January 2003 https://doi.org/10.1109/TMTT.2002.806514
  3. Joachim Oberhammer, Goran Stemme, 'Low- Voltage High-Isolation DC-toRF MEMS Switch Based on an S-shaped Film Actuator,' IEEE Transactions on Electronic Devices, Vol. 51, No. 1, pp. 149-155, January 2004 https://doi.org/10.1109/TED.2003.820655
  4. Lei L. Mercado, Shun-Meen Kuo, Tien-Yu Tom Lee, Lianjun Liu. 'A Mechanical Approach to Overcome RF MEMS Switch Stiction Problem,' Electronic Component and Technology Conference, 2003
  5. Hector J. De Los Santos, Georg Fischer, Harrie A.C. Tilmans, Joost T.M. van Beek, 'RF MEMS for Ubiquitous Wireless Connectivity,' IEEE Microwave Magzine, pp.36-49, December 2004
  6. Jong-Man Kim; Jae-Hyoung Park; Chang-Wook Baek; Yong-Kweon Kim, 'The SiOG-based singlecrystalline silicon (SCS) RF MEMS switch with uniform characteristics,' Journal of Microelectromechanical Systems, Vol. 13, Issue 6, Dec. 2004, pp.1036 - 1042 https://doi.org/10.1109/JMEMS.2004.838365
  7. M. Sakata, Y.Komura, T.Seki, K.Kobayashi, K. Sano, S. Horiike, 'Micromachined relay which utilized single crystal silicon electrostatic actuator,' 12th IEEE International Conference on. (MEMS), pp.21-24, 1999
  8. Il-Joo Cho, Taeksang Song, Sang-Hyun Baek, Euisik Yoon, 'A Low-Voltage and Low-Power RF MEMS Series and Shunt Switches Actuated by Combination of Electromagnetic and Electrostatic Forces,' IEEE Transactions on Microwave Theory and Techniques, Vol. 53, No. 7, July 2005

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