Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 20 Issue 2
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- Pages.3-11
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- 2007
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
An On-line Monitoring and Control System for Semiconductor Manufacturing Process Utilizing Fuzzy Rule Extraction
- Chen, Jen-Cheng (Chung Yuan Christian Univ.) ;
- Chang, Ming (Chung Yuan Christian Univ.)
- Published : 2007.02.01
Abstract
Keywords