Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Fabrication and Characterization of Micro parts by Mechanical Micro Machining: Precision and Cost Estimation

기계식 마이크로 머시닝을 이용한 마이크로 형상의 특성과 비용 평가

  • 강혁진 (서울대학교 기계항공공학부, 정밀기계설계공동연구소) ;
  • 최운용 (서울대학교 기계항공공학부, 정밀기계설계공동연구소) ;
  • 안성훈 (서울대학교 기계항공공학부)
  • Published : 2007.01.01
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Abstract

Recently, demands on mechanical micro machining technology have been increased in manufacturing of micro-scale precision shapes and parts. The main purpose of this research is to verify the accuracy and cost efficiency of the mechanical micro machining. In order to measure the precision and feasibility of mechanical micro machining, various micro features were machined. Aluminum molds were machined by a 3-axis micro stage in order to fabricate microchips with $200{\mu}m$ wide channel for capillary electrophoresis, then the same geometry of microchip was made by injection molding. To evaluate the cost efficiency of various micro manufacturing processes, cost estimation for mechanical micro machining was conducted, and actual costs of microchips fabricated by mechanical micro machining, injection molding, and MEMS (Micro electro mechanical system) were compared.

Keywords

References

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