Journal of information and communication convergence engineering

  • 제5권4호
  • /
  • Pages.316-319
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  • 2007
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  • 2234-8255(pISSN)
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  • 2234-8883(eISSN)
한국정보통신학회 (The Korea Institute of Information and Commucation Engineering)
권호 표지

A Method to Improve Bragg Reflectors Quality in FBAR Devices

  • Mai, Linh (School of Engineering, Information and Communications University(ICU)) ;
  • Lee, Jae-Young (School of Engineering, Information and Communications University(ICU)) ;
  • Pham, Van Su (School of Engineering, Information and Communications University(ICU)) ;
  • Yoon, Gi-Wan (School of Engineering, Information and Communications University(ICU))
  • 발행 : 2007.12.30
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초록

This paper presents some methods to improve the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices. The FBAR devices were fabricated on multilayer Bragg reflectors (BR) into which very thin chromium (Cr) adhesion layers were inserted, followed by several kinds of thermal annealing processes. These methods resulted in an excellent device improvement in terms of return loss and Q-factors.

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참고문헌

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