참고문헌
- Gates, B. D., Xu, Q., Love, J. C., Wolfe, D. B. and Whitesides, G M., 'Unconventional Nanofabrication,' Annual Review of Materials Research, Vol. 34, pp. 339-372, 2004 https://doi.org/10.1146/annurev.matsci.34.052803.091100
- Chou, S.Y., Krauss, P.R. and Renstrom, P.J., 'Imprint of Sub-25 nm Vias and Trenches in Polymers,' Applied Physics Letters, Vol. 67, No. 21, pp. 3114-3116, 1995 https://doi.org/10.1063/1.114851
- Chou, S.Y., Krauss, P.R. and Renstrom, P.J., 'Nanoimprint Lithography,' J. Vacuum Science and Technology B, Vol. 14, No.6, pp. 4129-4133, 1996 https://doi.org/10.1116/1.588605
- Austin, M.D., Ge, H., Wu, W., Li, M., Yu, Z., Wasserman, D., Lyon, S.A. and Chou, S.Y., 'Fabrication of 5 nm Linewidth and 14 nm Pitch Features by Nanoimprint Lithography,' Applied Physics Letters, Vol. 84, No. 26, pp. 5299-5301, 2004 https://doi.org/10.1063/1.1766071
- Zhang, W. and Chou, S.Y., 'Fabrication of 60-nm Transistors on 4-in. Wafer Using Nanoimprint at All Lithography Levels,' Applied Physics Letters, Vol. 83, No.8, pp. 1632-1634, 2003 https://doi.org/10.1063/1.1600505
- Chao, C. and Guo, LJ., 'Polymer Microring Resonators Fabricated by Nanoimprint Technique,' J. Vacuum Science and Technology B, Vol. 20, No.6, pp. 2862-2866, 2002 https://doi.org/10.1116/1.1521729
- Arakcheeva, E.M., Tanklevskaya, E.M., Nesterov, S.I., Maksimov, M.V., Gurevich, S.A., Seekamp, J. and Torres, C.M.S., 'Fabrication of Semiconductor and Polymer-based Photonic Crystals using Nanoimprint Lithography,' Technical Physics, Vol. 50, no. 8, pp. 1043-1047, 2005 https://doi.org/10.1134/1.2014536
- Cheng, X., Hong, Y.T., Kanicki, J. and Guo, L.J., 'High-resolution Organic Polymer Light-emitting Pixels Fabricated by Imprinting Technique,' J. Vacuum Science and Technology B, Vol. 20, No.6, pp. 2877-2880, 2002 https://doi.org/10.1116/1.1515307
- Kao, P.C., Chu, S.Y., Chen, T.Y., Zhan, C.Y., Hong, EC., Chang, c.y., Hsu, L.C., Liao, W.C. and Hon, M.H., 'Fabrication of Large-scaled Organic Light Emitting Devices on the Flexible Substrates using Low-pressure Imprinting Lithography,' IEEE Transactions on Electrical Devices, Vol. 52, No.8, pp. 1722-1726, 2005 https://doi.org/10.1109/TED.2005.851811
- Ahn S W, Lee K D, Kim J. S, Kim S H, Park J. D, Lee SHand Yoon P W, 'Fabrication of a 50 nm Half-pitch Wire Grid Polarizer using Nanoimprint Lithography,' Nanotechnology, Vol. 16, No.9, pp. 1874-1877, 2005 https://doi.org/10.1088/0957-4484/16/9/076
- Heyderman, L.J., Schitf, H., David, C., Gobrecht, J. and Schweizer, T., 'Flow Behaviour of thin Polymer Films Used for Hot Embossing Lithography,' Micro-electronic Engineering, Vol. 54, pp. 229-245, 2000 https://doi.org/10.1016/S0167-9317(00)00414-7
- Hirai, Y., Yoshida, S. and Takagi, N., 'Defect Analysis in Thermal Nanoirnprint Lithography,' J. Vacuum Science and Technology B, Vol. 21, No.6, pp. 2765-2770, 2003 https://doi.org/10.1116/1.1629289
- Hirai, Y., Yoshida, S., Takagi, N., Tanaka, Y., Yabe, H., Sasaki, K., Sumitani, H. and Yamamoto, K., 'High Aspect Pattern Fabrication by Nano Imprint Lithography Using Fine Diamond Mold,' Japanese J. Applied Physics Part 1, Vol. 42, pp. 3863-3866, 2003 https://doi.org/10.1143/JJAP.42.3863
- Kang, J.H., Kim, K.S. and Kim, K.W., 'Molecular Dynamics Study of Pattern Transfer in Nanoimprint Lithography,' Tribology Letters, Vol. 25, No.2, pp. 93-102, 2007 https://doi.org/10.1007/s11249-006-9053-4
- Pocius, A.V.: Adhesion and Adhesives Technology: An Introduction, Hanser/Cardner Publications, Inc., New York (1997)
- Tambe, N.S. and Bhushan, B., 'Scale Dependence of Micro/nano-friction and Adhesion of MEMSINEMS Materials, Coatings and Lubricants,' Nanotechnology, Vol. 15, pp. 1561-1570, 2004 https://doi.org/10.1088/0957-4484/15/11/033
- Tambe, N.S. and Bhushan, B., 'Durability Studies of Micro/nanoelectromechanical Systems Materials, Coatings and Lubricants at High Sliding Velocities (up to 10 mm/s) using a Modified Atomic Force Microscope,' J. Vacuum Science and Technology B, Vol. 23, No.4, pp. 830-835, 2005 https://doi.org/10.1116/1.1843821
- Tambe, N. S. and Bhushan, B., 'Micro/nanotribological Characterization of PDMS and PMMA used for BioMEMS/NEMS Applications,' Ultramicroscopy, Vol. 105, pp. 238-247, 2005 https://doi.org/10.1016/j.ultramic.2005.06.050
- Bhushan, B. and Burton, Z., 'Adhesion and Friction Properties of Polymers in Microfluidic Devices,' Nanotechnology, Vol. 16, pp. 467-478, 2005 https://doi.org/10.1088/0957-4484/16/4/023
- Burton, Z. and Bhushan, B., 'Hydrophobicity, Adhesion, and Friction Properties of Nanopatterned Polymers and Scale Dependence for Micro- and Nanoelectromechanical Systems,' Nano Letters, Vol. 5, No.8, pp. 1607-1613, 2005 https://doi.org/10.1021/nl050861b
- Yoon, E.S., Singh, R.A., Kong, H., Kim, B., Kim, D.H., Jeong, H.E. and Suh, K.Y., 'Tribological Properties of Bio-mimetic Nano-patterned Polymeric Surfaces on Silicon Wafer,' Tribology Letters, Vol. 21, No.1, pp. 31-37, 2006 https://doi.org/10.1007/s11249-005-9005-4
- Hammerschmidt, J.A., Gladfelter, W.L., and Haugstad, G., 'Probing Polymer Viscoelastic Relaxations with Temperature-controlled Friction Force Microscopy,' Macromolecules, Vol. 32, No. 10, pp. 3360-3367, 1999 https://doi.org/10.1021/ma981966m
- Wang, X.P., Tsui, O.K.C. and Xiao, X., 'Dynamic Study of Polymer Films by Friction Force Microscopy with Continuously Varying Load,' Langmuir, Vol. 18, pp. 7066-7072, 2002 https://doi.org/10.1021/la020270q
- Tsui, O.K.C, Wang, X.P., Ho, J.Y.L., Ng, T.K. and Xiao, X., 'Studying Surface Glass-to-rubber Transition using Atomic Force Microscopic Adhesion Measurements,' Macromolecules, Vol. 33, pp. 4198-4204, 2000 https://doi.org/10.1021/ma991473x
- Wei, G., Bhushan, B., Ferrell, N. and Hansford, D., 'Microfabrication and Nanomechanical Characterization of Polymer Microelectromechanical System for Biological Applications,' J. Vacuum Science and Technology A, Vol. 23, No.4, pp. 811-819, 2005 https://doi.org/10.1116/1.1861937
- Mikromasch homepage, http://www.spmtips.com
- Varenberg, M., Etsion, I. and Halperin, G., 'An improved Wedge Calibration Method for Lateral Force in Atomic Force Microscopy,' Review of Scientific Instruments, Vol. 74, No.7, pp. 3362-3367, 2003 https://doi.org/10.1063/1.1584082
- Sader, J. E., Chon, J.W.M. and Mulvaney, P., 'Calibration of Rectangular Atomic Force Microscope Cantilevers,' Review of Scientific Instruments, Vol. 70, No. 10, pp. 3967-3969, 1999 https://doi.org/10.1063/1.1150021
- Ono, N., Kitamura, K., Nakajima, K. and Shimanuki, Y., 'Measurement of Young's Modulus of Silicon Single Crystal at High Temperature and Its Dependency on Boron Concentration using the Flexural Vibration Method,' Japanese J. Applied Physics, Vol. 39, pp. 368-371, 2000 https://doi.org/10.1143/JJAP.39.368
- Breakspear S, Smith J. R, Nevell T G and Tsibouklis J., 'Friction Coefficient Mapping using the Atomic Force Microscope,' Surface and Interface Analysis, Vol. 36, pp. 1330-1334, 2004 https://doi.org/10.1002/sia.1914
- Tocha, E., Schonherr, H. and Vancso, G.J., 'Quantitative Nanotribology by AFM: A Novel Universal Calibration Platform,' Langmuir, Vol. 22, pp. 2340-2350, 2006 https://doi.org/10.1021/la052969c
- Bouissou, S., Petit, J.P. and Barquins, M., 'Stress drop and Contact Stiffness Measured from Stick-slip Experiments on PMMA-PMMA Friction,' Tribology Letters, Vol. 7, pp. 61-65, 1999 https://doi.org/10.1023/A:1019152832763
- Yang, Z., Dong, B., Huang, Y., Liu, L., Yan, F.Y. and U, H.L., 'A Study on Carbon Nanotubes Reinforced Po1y(methyl methacrylate) Nanocomposites,' Materials Letters, Vol. 59, pp. 2128-2132, 2005 https://doi.org/10.1016/j.matlet.2005.02.046
- McCrum N G, Read B E and Williams G 1967 Anelastic and Dielectric Effects in Polymeric Solids (London: John Wiley & Sons) pp. 242
-
Bistac, S. and Schultz, J., 'Study of Solution-cast Film of PMMA by Dielectric Spectroscopy: Influence of the Nature of the Solvent on a and
$\beta$ relaxations,' International J. Adhesion and Adhesives, Vol. 17, No.3, pp. 197-201, 1997 https://doi.org/10.1016/S0143-7496(97)00001-8 -
Fukao, K., Uno, S., Miyamoto, Y., Hoshino, A. and Miyaji, H., 'Dynamics of
$\alpha$ and$\beta$ Processes in thin Polymer Films: Poly(vinyl acetate) and Poly(methyl methacrylate),' Physical Review E, Vol. 64, 051807, 2001 https://doi.org/10.1103/PhysRevE.64.051807