Journal of Mechanical Science and Technology

  • 제20권10호
  • /
  • Pages.1646-1652
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  • 2006
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  • 1738-494X(pISSN)
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  • 1976-3824(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
권호 표지

Modeling of Mechanical Behavior of Microcantilever due to Intrinsic Strain during Deposition

  • Kim Sang-Hyun (CSE Center, Samsung Advanced Institute of Technology) ;
  • Mani Sathyanarayanan (Department of Aerospace Engineering, 3141 TAMU, Texas A&M University, College Station) ;
  • Boyd James G. IV (Department of Aerospace Engineering, 3141 TAMU, Texas A&M University, College Station)
  • 발행 : 2006.10.01
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초록

A model of mechanical behavior of microcantilever due to intrinsic strain during deposition of MEMS structures is derived. A linear ordinary differential equation is derived for the beam deflection as a function of the thickness of the deposited layer. Closed-form solutions are not possible, but numerical solutions are plotted for various dimensionless ratios of the beam stiffness, the intrinsic strain, and the elastic moduli of the substrate and deposited layer. This model predicts the deflection of the cantilever as a function of the deposited layer thickness and the residual stress distribution during deposition. The usefulness of these equations is that they are indicative of the real time behavior of the structures, i.e. it predicts the deflection of the beam continuously during deposition process.

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