Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Analysis on the Optical Properties and Fabrication of Textured AZO Thin Films for Increasing the Efficiency of LED

LED 효율 향상을 위한 Texture구조 AZO 박막의 제조와 광학적 특성분석

  • 김경민 (원광대학교 전기전자 및 정보공학부) ;
  • 진은미 (원광대학교 전기전자 및 정보공학부) ;
  • 박춘배 (원광대학교 전기전자 및 정보공학부)
  • Published : 2006.10.01
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Abstract

The transparent conductive oxide(TCO) has been used in necessity as front electrode for increasing efficiency of LED. In our paper, aluminium-doped zinc oxide films(AZO), which has transparent conducting were prepared with RF magnetron sputtering system on glass substrate(corning 1737) and annealed at $400^{\circ}C$ for 2 hr in vacuum ambient and $600^{\circ}C$ for 2hr with $O_2$ ambient respectively. The smooth AZO films were etched in diluted HCL(0.5 %) to examine the surface properties, which in ambient post-annealing process. We confirmed that the electric, structural and optical properties of textured AZO thin films, which implemented using the methods of XRD, FWHM, AFM and Hall measurement. The properties of textured AZO thin films especially depended on the ambient post-annealing process. We presumed that the change of transmittances as R G B LED and the ambient post-annealing process will be increasing the efficiency of LED.

Keywords

References

  1. A. Gupta and A. D. Compann, 'All-sputtered 14 % CdS/CdTe thin-film solar cell with ZnO:AI transparent conducting oxide', Appl, Phys. Lett., Vol. 85, No.4, p. 684, 2004 https://doi.org/10.1063/1.1775289
  2. Z. L. Pei, C. Sun, M. H. Tan, J. Q. Xiao, D. H. Guan, R. F. Huang, and L. S. Wen, 'Optical and electrical properties of direct-current magnetron sputtered ZnO:Al films', J. Appl. Phys., Vol. 2001, No.7, p. 3432, 2001
  3. 양진석, 성하균, 금민종, 신성권, 손인환, 김경환, '태양전지용 ZnO:Al 투명전도막의 제작', 한국전기전자재료학회 2001하계학술대회논문집, p. 463, 2001
  4. 유진수, 이정철, 김석기, 윤경훈, 박이준, 이준신, '표면 텍스쳐된 ZnO:Al 투명 전도막 증착 및 특성', 대한전기학회논문지, 52권, 9호, p. 378, 2003
  5. 박용욱, 윤석진, 최지원, 김현재, 정영진, 박창엽, 'RF 마그네트론 반응성 스퍼터링으로 제작된 ZnO/Glass 박막 특성', 전기전자재료학회논문지, 11권, 10호, p. 833, 1998
  6. R. J. Hong, K. Helming, X. Jiang, and B. Szyszka, 'Texture analysis of Al-doped ZnO thin films prepared by in-line reactive MF magnetron sputtering', Applied Surface Science, Vol. 226, No.4, p. 378, 2004 https://doi.org/10.1016/j.apsusc.2003.10.040
  7. X. T. Hao, L. W. Tan, K. S. Ong, and F. Zhu, 'High-performance low-temperature transparent conducting aluminum doped ZnO thin films and applications', Journal of Crystal Growth, Vol. 287, No.1, p. 44, 2006 https://doi.org/10.1016/j.jcrysgro.2005.10.040
  8. R. J. Hong, X. Jiang, G. Heide, B. Szyszka, V. Sittinger, and W. Werner, 'Growth behaviours and properties of the ZnO:Al films prepared by reactive mid-frequency magnetron sputtering', Journal of Crystal Growth, Vol. 249, No. 3-4, p. 461, 2003 https://doi.org/10.1016/S0022-0248(02)02270-4
  9. C. Huh, K. S. Lee, E. J. Kang, and S. J. Park, 'Improved light-output and electrical performance of InGaN-based light-emitting diode by microroughening of the p-GaN surface', J. Appl. Phys., Vol. 93, No. 11, p. 9383, 2003 https://doi.org/10.1063/1.1571962
  10. T. Fujii, Y. Gao, R. Sharma, E. L. Hu, S. P. DenBaars, and S. Nakamura, 'Increase in the extraction efficiency of GaN-based light-emitting diodes via surface roughening', Appl. Phys. Lett., Vol. 84, No.6, p. 855, 2004 https://doi.org/10.1063/1.1645992
  11. 김경민, 진은미, 김덕규, 박춘배, '$Al_2O_3$함량에 따른 bulk형 AZO의 구조적 특성', 한국전기전자재료학회 2006춘계학술대회논문집, p. 51, 2006
  12. 김경민, 김덕규, 오상현, 박춘배, 'LED 적용을 위한 AZO 투명전도 박막의 표현 texture 구조분석', 한국전기전자재료학회 2006하계학술대회논문집, p. 103, 2006
  13. T. Tsuji and M. Hirohashi, 'Influence of oxygen partial pressure on transparency and conductivity of RF sputtered Al-doped ZnO thin films', Applied Surface Science, Vol. 157, No. 1-2, p. 47, 2000 https://doi.org/10.1016/S0169-4332(99)00561-9
  14. V. Gupta and A. Mansingh, 'Influence of postdeposition annealing on the structural and optical properties of sputtered zinc oxide film', J. Appl, Phys., Vol. 80, No.2, p. 1063, 1996 https://doi.org/10.1063/1.363092
  15. 유인성, 소순진, 박춘배, '기판의 결정구조에 따른 RF 스퍼터링 ZnO 박막의 성장과 미세구조분석', 전기전자재료학회논문지, 19권, 5호, p. 461, 2006 https://doi.org/10.4313/JKEM.2006.19.5.461
  16. G. J. Fang, D. Li, and B. L. Yao, 'Influence of post-deposition annealing on the properties of transparent conductive nanocrystalline ZAO thin films prepared by RF magnetron sputtering with highly conductive ceramic target', Thin Solid films, Vol. 418, No.2, p. 156, 2002 https://doi.org/10.1016/S0040-6090(02)00733-2

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