Laser Solutions (한국레이저가공학회지)

Korean Society of Laser Processing (한국레이저가공학회)
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Digital Micromirror Device Based Microstereolithography for the Fabrication of 3D Microstructures

미세 3차원 구조물 제조를 위한 디지털 마이크로미러소자 응용 마이크로 광조형

  • Joo, J.Y. (Department of Mechatronics, Gwangju Institute of Science and Technology) ;
  • Kim, S.H. (Department of Mechatronics, Gwangju Institute of Science and Technology) ;
  • Jeong, S.H. (Department of Mechatronics, Gwangju Institute of Science and Technology)
  • 주재영 (광주과학기술원 기전공학과) ;
  • 김성훈 (광주과학기술원 기전공학과) ;
  • 정성호 (광주과학기술원 기전공학과)
  • Published : 2006.05.01
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Abstract

In order to increase the productivity of conventional microstereolithography (MSL), digital micromirror device($DMD^{TM}$) based MSL is proposed and the feasibility of 3D rnicrocomponents fabrication is demonstrated in two ways; free surface and constrained surface techniques. The clearness of optical images at the exposure plane was confirmed for the fabrication of an accurate 3D structure by controlling the dynamic viscosity of FA1260T and the shape accuracy of a structure fabricated with epoxy-based resin ($Somos^{\circledR}$ 10120) was analyzed to determine the optimum curing conditions. After finding the appropriate process variables, the feasibility of multiple microstructures is then demonstrated. Due to the high productivity, MSL using $DMD^{TM}$ showed the potential to replace the existing focused laser beam MSL.

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