한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제39권5호
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  • Pages.199-205
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  • 2006
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지

AISI 420 stainless steel 기판위에 D.C magnetron sputtering 법으로 제조한 TiN 박막의 특성 평가

Processing and Characterization of RF Magnetron Sputtered TiN Films on AISI 420 Stainless Steel

  • 송승우 (전남대학교 공과대학 금속공학과) ;
  • 최한철 (조선대학교 치과대학 치의학과) ;
  • 김영만 (전남대학교 공과대학 금속공학과)
  • Song, Seung-Woo (Department of Materials Science and Engineering, Chonnam National University) ;
  • Choe, Han-Cheol (Department of Dental Materials, Chosun University) ;
  • Kim, Young-Man (Department of Materials Science and Engineering, Chonnam National University)
  • 발행 : 2006.10.30
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초록

Titanium nitride (TiN) coatings were produced on AISI 420 stainless steel by DC magnetron sputtering of a Ti target changing the processing variables, such as the flow rate of $N_2/Ar$, substrate temperature and the existence of Ti interlayer between TiN coatings and substrates. The hardness and residual stress in the films were investigated using nanoindentation and a laser scanning device, respectively. The stoichiometry and surface morphology were investigated using X-Ray Diffraction and SEM. The corrosion property of the films was also studied using a polarization method in NaCl (0.9%) solution. Mechanical properties including hardness and residual stress were related to the ratio of $N_2/Ar$ flow rate. The corrosion resistance also was related to the processing variables.

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