참고문헌
- Binning, G., Quate, C. F. and Gerber, Ch., 1986, 'Atomic Force Microscope,' Phys. Rev. Lett., Vol. 56, pp. 930-933 https://doi.org/10.1103/PhysRevLett.56.930
- Bhushan, B., Israelachvili, J. N. and Landman, U., 1995, 'Nanotribology: Friction, Wear and Lubrication at Atomic Scale,' Nature, Vol. 374, pp. 607-616 https://doi.org/10.1038/374607a0
- Piner, R. D., Zhu, J., Xu, F., Hong, S. and Mirkin, C. A., 1999, 'Dip-pen Nanolithography,' Science, Vol. 283, pp. 661-663 https://doi.org/10.1126/science.283.5402.661
- Meister, A., Jeney, S., Liley, M., Akiyama, T., Staufer, U., de Rooij, N. F. and Heintzelmann, H., 2003, 'Nanoscale Dispensing of Liquids Through Cantilevered Probes,' Microelectron. Eng., Vol. 67-68, pp, 644-650 https://doi.org/10.1016/S0167-9317(03)00126-6
- Hong, S., Zhu, J, and Mirkin, C. A., 1999, 'Multiple Ink Nanolithography: Toward a Multiple-Pen Nano-Plotter,' Science, Vol. 286, pp. 523-525 https://doi.org/10.1126/science.286.5439.523
- Hong, S., and Mirkin, C. A., 2000, 'A Nanoplotter with Both Parallel and Serial Writing Capabilities,' Science, Vol. 288, pp. 1808-1811 https://doi.org/10.1126/science.288.5472.1808
- Lewis, A., Kheifetz, Y., Shambrodt, E., Radko, A., Khatchatryan, E. and Sukenik, C., 1999, 'Fountain Pen Nanochemistry: Atomic Force Control of Chrome Etching,' Appl. Phys. Lett., Vol. 75, No. 17, pp. 2689-2691 https://doi.org/10.1063/1.125120
- Shalom, S., Lieberman, K., Lewis, A. and Cohen, S. R., 1992, 'A Micropipette Force Probe Suitable for Near-field Scanning Optical Microscopy,' Rev. Sci. Instrum., Vol. 63, No. 9, pp. 4061-4065 https://doi.org/10.1063/1.1143212
- Lieberman, K., Lewis, A., Fish, G., Shalom, S., Jovin, T. M., Schaper, A. and Cohen, S. R., 1994, 'Multifunctional, Micropipette Based Force Cantilevers for Scanned Probe Microscopy,' Appl. Phys. Lett., Vol. 65, No. 5, pp. 648-650 https://doi.org/10.1063/1.112259
- Vettiger, P., Despont, M., Drechsler, U., Durig, U., Haberle, W., Lutwyche, M. I., Rothuizen, H. E., Stutz, R., Widmer, R. and Binnig, G. K., 2000, 'The Millipede - More than One Thousands Tips for Future AFM Data Storage,' IBM J. Res. Develop., Vol. 44, No. 3, pp. 323-340 https://doi.org/10.1147/rd.443.0323
- Zhang, M., Bullen, D., Chung, S.-W., Hong, S., Ryu, K. S., Fan, Z., Mirkin, C. A. and Liu, C., 2002, 'A MEMS Nanoplotter with High-density Parallel Dip-pen Nanolithography Probe Array,' Nanotechnology, Vol. 13, pp. 212-217 https://doi.org/10.1088/0957-4484/13/2/315
- Kim, K. H., Ke, C., Moldovan, N. and Espinosa, H. D., 2003, 'Massively Parallel Multi-tip Nanoscale Writer with Fluidic Capabilities --fountain Pen Nanolithography(FPN),' Proc. 4th Int. Symp. on MEMS and Nanotechnology, pp. 235-238
- Deladi, S., Berenschot, J. W., Tas, N. R., Krijnen, G. J. M., de Boer, J. H., de Boer, M. J. and Elwenspoek, M. C., 2005, 'Fabrication of Micromachined Fountain Pen with in Situ Characterization Possibility of Nano Scale Surface Modification,' J. Micromech. Microeng., Vol. 15, pp. 528-534 https://doi.org/10.1088/0960-1317/15/3/013
- Madou, M. J., 2002, 'Fundamentals of Microfabrication The Second Edition,' CRC, p. 148
- Sader, J. E., 1995, 'Parallel Beam Approximation for V-shaped Atomic Force Microscope Cantilevers,' Rev. Sci. Instrum., Vol. 66, pp. 4583-4587 https://doi.org/10.1063/1.1145292
- Colgate, E. and Matsumoto, H., 1990, 'An Investigation of Electro-Wetting-Based Microactuation,' J. Vac. Sci. Technol., Vol. A8, pp. 3625-3633 https://doi.org/10.1116/1.576516
- Sobolev, V. D.,'Surface Tension and Dynamic Contact Angle of Water in Thin Quartz Capillaries,' J. Colloid Interface Sci., Vol. 222, pp. 51-54 https://doi.org/10.1006/jcis.1999.6597
- Yang, Lung-Jieh, Yao, Tze-Jung and Tai, Yu-Chong, 2004, 'The Marching Velocity of the Capillary Meniscus in a Microchannel,' J. Micromech. Microeng. Vol. 14, pp. 220-225 https://doi.org/10.1088/0960-1317/14/2/008
- Tirnoshenko, S. and Woinowsky-Krieger, S., 1959, 'Theory of Plates and Shells The Second Edition,' McGRAW-HILL Book Company