Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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A Study on Flow Characteristics of Fountain-pen Nano-Lithography with Active Membrane Pumping

능동적 박막 펌핑에 의한 파운틴 펜 나노 리소그래피 유동 특성에 관한 연구

  • 이진형 (성균관대 대학원 기계공학부) ;
  • 이영관 (성균관대 대학원 기계공학부) ;
  • 이성근 (성균관대 대학원 기계공학부) ;
  • 이석한 (성균관대 정보통신공학부) ;
  • 김윤제 (성균관대 기계공학부) ;
  • 김훈모 (성균관대 기계공학부)
  • Published : 2006.08.01
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Abstract

In this study, the flow characteristics of a FPN (Fountain Pen Nano-Lithography) using active membrane pumping are investigated. The FPN has integrated chamber, micro channel, and high capacity reservoir for continuous ink feed. The most important aspect in this probe provided control of fluid injection using active membrane pumping in chamber. The flow rates in channel by capillary force are theoretically analyzed, including the control of the mass flow rates by the deflection of the membrane. The above results are compared with the numerical simulations that calculated by commercial code, FLUENT. The velocity of the fluid in micro channel shows linear behaviors. And the mass flows are proportional to the second order function of the pumping pressure that is imposed to the membrane.

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References

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