Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Room Temperature Fabrication of Organic Flexible Displays using Amorphous IZO Anode Film

비정질 IZO 애노드 박막을 이용한 유기물 플렉서블 디스플레이의 상온 제작

  • 문종민 (국립금오공과대학교 신소재시스템공학부) ;
  • 배정혁 (국립금오공과대학교 신소재시스템공학부) ;
  • 정순욱 (국립금오공과대학교 신소재시스템공학부) ;
  • 박노진 (국립금오공과대학교 신소재시스템공학부) ;
  • 강재욱 (서울대학교 OLED센터) ;
  • 김한기 (국립금오공과대학교 신소재시스템공학부)
  • Published : 2006.07.01
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Abstract

We report on the fabrication of organic-based flexible displays using an amorphous IZO anode grown at room temperature. The IZO anode films were grown by a conventional DC reactive sputtering on the polycarbonate (PC) substrate at room temperature using a synthesized IZO target in a $Ar/O_2$ ambient. Both x-ray diffraction (XRD) and high resolution electron microscope (HREM) examination results show that the IZO anode film grown at room temperature Is complete amorphous structure due to low substrate temperature. A sheet resistance of $35.6\Omega/\Box$, average transmittance above 90 % in visible range, and root mean spare roughness of $6\sim10.5\AA$ were obtained even in the IZO anode film grown on PC substrate at room temperature. It is shown that the $Ir(ppy)_3$ doped flexible organic light emitting diode (OLED) fabricated on the IZO anode exhibit comparable current-voltage-luminance characteristics as well as external quantum efficiency and power efficiency to OLED fabricated on conventional ITO/Glass substrate. These findings indicate that the IZO anode film grown on PC substrate is a promising anode materials for the fabrication of organic based flexible displays.

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References

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