참고문헌
- Parao, J. M. and Weisbold, L., 1965, 'How to design Flexure Hinges,' Machine Design
- Smith, S. T. and Chetwynd, D. G., 1994, Foundation of Ultraprecision Mechanism Design, Gordon and Breach Science Publisher, pp. 99-100
- Lee, D. S., Park, J. H. and Park, H. J., 1999, 'Ultraprecision positioning system for servo motorpiezo actuator using the dual servo loop and digital filter implementation,' Journal of the Korean Society of Precision Engineering, Vol. 16, pp. 154-163
- Kwac, L. K., Kim, J. Y., Yang, D. J., Ko, M. S., You, S. and Kim, K. T., 2002, 'Optimal Design of Controller for Ultraprecision Plane X-Y Stage,' Journal of the Korean Society of Precision Engineering, pp. 342-347
- Kim, J. Y., Lee, B. R., Yang, S. Y. and Ahn, K. K., 2003, 'Precision Position Control of Piezoactuator Using Inverse Hysteresis Model and Neuro-PID Controller,' Journal of Control, Automation and Systems Engineering, Vol. 9, No. 1, pp. 22-29 https://doi.org/10.5302/J.ICROS.2003.9.1.022
- Kang, J. O., Seo, M. H., Han, C. S. and Hong, S. W., 2004, 'Development of 3-axis Fine Positioning Stage: Analysis and Design,' Journal of the Korean Society of Precision Engineering, Vol. 21, pp. 147-154
- Kang, J. O., Back, S., Han, C. S. and Hong, S. W., 2004, 'Development of 3-axis Fine Positioning Stage: Fabrication and Performance Evaluation,' Journal of the Korean Society of Precision Engineering, Vol. 21, pp. 155-162
- Park, J. S. and Jeong, K. W., 2005, 'A study of the Design and Control System for the Ultra-precision Stage,' Proceedings of the Korean Society of Machine Tool Engineers Spring Conference, pp. 54-59
- Ogata, K., 1997, Modern Control Engineering, Prentice-Hall, 3rd Edition, pp. 134-155
- Jeong, S. H., Kim, G. H., Char, K. R., Lee, K. H. and Song, S., 2006, 'A Study on the Motion Mechanism of Multi-Axis Ultra Precision Stage for Optical Element Alignment,' Transactions of the Korean Society of Machine Tool Engineers, Vol. 15, No. 1, pp. 8-16