Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Overview on the Development of UHV Ion Pumps

초고진공 이온펌프의 개발에 관한 개관

  • Published : 2006.05.01
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Abstract

The paper reviews the development of ion pumps, their operating principles and describes particular designs. The performance of ion pumps when used for various gases, their range of operation and fields of application are discussed.

본 총설논문에서는 초고진공 이온펌프의 개발에 대한 고찰을 하였으며, 이온펌프의 동작원리와 특정 디자인에 대하여 설명하였다. 다양한 가스를 사용할 때의 이온펌프의 성능과 동작범위, 그리고 응용분야 등을 논의하였다.

Keywords

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