Laser Solutions (한국레이저가공학회지)
- Volume 9 Issue 2
- /
- Pages.11-15
- /
- 2006
- /
- 1229-0963(pISSN)
High-Speed Femtosecond Laser Micromachining with a Scanner
스캐너를 이용한 고속 펨토초 레이저 가공 기술
-
Sohn, Ik-Bu
(Advanced Photonics Research Institute, GIST)
;
- Choi, Sung-Chul (Advanced Photonics Research Institute, GIST) ;
-
Noh, Young-Chul
(Advanced Photonics Research Institute, GIST)
;
-
Ko, Do-Kyeong
(Advanced Photonics Research Institute, GIST)
;
- Lee, Jong-Min (Advanced Photonics Research Institute, GIST)
-
손익부
(광주과학기술원 고등광기술연구소)
;
- 최성철 (광주과학기술원 고등광기술연구소) ;
-
노영철
(광주과학기술원 고등광기술연구소)
;
-
고도경
(광주과학기술원 고등광기술연구소)
;
- 이종민 (광주과학기술원 고등광기술연구소)
- Published : 2006.09.30
Abstract
We report experimental results on the high-speed micromachining using a femtosecond laser (800 nm, 130 fs, 1kHz) and galvanometer scanner system (Raylase, Germany). Periodic hole drilling of silicon and glass with the scan speed of 1-20 mm/s is demonstrated. Finally, we demonstrate the utility of the femtosecond laser application to ITO patterning by using a high-speed femtosecond laser scanner system.