Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 5 Issue 4 Serial No. 17
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- Pages.5-9
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- 2006
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- 1738-2270(pISSN)
Effects of Sr/Ca Ratio of SCT thin film by RF Sputtering Method
RF 스퍼터링법에 의한 SCT 박막의 Sr/Ca 비율 영향
- Kim, Jin-Sa (Dept. of Electrical Engineering, KwangWoon University) ;
- Oh, Yong-Cheul (Dept. of Computer Control Engineering, Incheon City College)
- Published : 2006.12.31
Abstract
The SCT thin films are deposited on Pt-coated electrode(