Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
권호 표지

Effects of Sr/Ca Ratio of SCT thin film by RF Sputtering Method

RF 스퍼터링법에 의한 SCT 박막의 Sr/Ca 비율 영향

  • Kim, Jin-Sa (Dept. of Electrical Engineering, KwangWoon University) ;
  • Oh, Yong-Cheul (Dept. of Computer Control Engineering, Incheon City College)
  • 김진사 (광운대학교 전기공학과) ;
  • 오용철 (인천전문대학 컴퓨터제어과)
  • Published : 2006.12.31
Download PDF
⟨ Previous Next ⟩

Abstract

The SCT thin films are deposited on Pt-coated electrode($Pt/TiN/SiO_2/Si$) using RF sputtering method with Sr/Ca ratio. The maximum grain of thin films is obtained by ratio of Ca at 15 mol%. The dielectric constant was increased with increasing the ratio of Ca, while it was decreased if the ratio of Ca exceeded over 15 mol%. The dielectric constant changes almost linearly in temperature ranges of $-80{\sim}+90$. All SCT thin films used in this study show the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 200 kHz. The current-voltage characteristics of SCT thin films showed the increasing leakage current as the measuring temperature increases.

Keywords