Polymer Science and Technology (한국고분자학회지:고분자과학과기술)
- Volume 17 Issue 2
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- Pages.182-190
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- 2006
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- 1225-0260(pISSN)
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- 2586-1476(eISSN)
Surface and Interface Properties of Polymers in Semiconductor Application
반도체용 고분자 소재의 표면 및 계면 특성
- Choi, Nam-Uk (Functional Material Part, Manufacturing Technology 1 Team, Memory Division, Samsung Electronics) ;
- Park, Seok-Bong (Functional Material Part, Manufacturing Technology 1 Team, Memory Division, Samsung Electronics) ;
- Moon, Sang-Sik (Functional Material Part, Manufacturing Technology 1 Team, Memory Division, Samsung Electronics) ;
-
Kim, Jae-Hyun
(Functional Material Part, Manufacturing Technology 1 Team, Memory Division, Samsung Electronics)
- 최남욱 (삼성전자 반도체총괄 생산기술1팀) ;
- 박석봉 (삼성전자 반도체총괄 생산기술1팀) ;
- 문상식 (삼성전자 반도체총괄 생산기술1팀) ;
-
김재현
(삼성전자 반도체총괄 생산기술1팀)
- Published : 2006.04.01
Abstract
Keywords