Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Study on the Reliability Analysis for a Linear Type Pneumatic Actuator with Cross Roller Guide

리니어 타입 크로스 롤러 가이드 공압 액추에이터의 신뢰성 평가에 관한 연구

  • 신봉철 (인하대학교 기계공학과 대학원) ;
  • 조명우 (인하대학교 기계공학과) ;
  • 강성민 ((주)프로텍 부설연구소) ;
  • 이수진 ((주)프로텍 부설연구소) ;
  • 최진화 (인하대학교 산업과학기술연구소)
  • Published : 2006.05.01
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Abstract

This research presents the performance analysis of the linear type pneumatic actuators that are used in semi-conductor assembly line to transfer some product with high accuracy. To increase positioning and repetitive accuracies, a cross roller guide is implemented inside the pneumatic actuator. The finite element method is used to verify the force against working moments, and reliability analysis is performed to classify the breakdown cases. Also, reliability, failure rate, probability density function, and $B_{10}$ to life are estimated under the boundary of thrust or air leakage conditions. In this study, the failure probabilistic function of the pneumatic actuators is analyzed using Weibull distribution.

Keywords

References

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