Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Study on Measurement Range Extension for Atomic Force Microscope

원자간력 현미경의 측정면적 확대에 관한 연구

  • 고명준 (금오공과대학교 대학원) ;
  • ;
  • 홍성욱 (금오공과대학교 기계공학부)
  • Published : 2006.04.01
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Abstract

This paper presents surface matching algorithms that can be used to reconstruct the surface topography of an object scanned by an AFM. The essence of the algorithms is to match up neighboring images intentionally overlapped with others. Two performance indexes using the correlation coefficient and the sum of the squared differences are introduced. To compensate for the inaccuracy of the coarse stage implemented to AFM, all the six axes including the rotational degrees of freedom are successively matched so as to maximize the coefficients defined. The results show that the proposed algorithms are useful for measurement range extension of AFM. The results also show that a combined use of the two indexes is beneficial for practical cases.

Keywords

References

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