한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제23권4호
  • /
  • Pages.139-145
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  • 2006
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

표면 탄성파를 이용한 온도센서의 제작 및 특성에 대한 연구

A study on the Fabrication and characterization of temperature Sensor using surface acoustic wave

  • 박재홍 (인하대학교 대학원 기계공학과) ;
  • 김재환 (인하대학교 기계공학과)
  • 발행 : 2006.04.01
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초록

This paper presents the design and manufacturing of a sensor using SAW and delay line in order to measure temperature. SAW sensors having single and double electrodes are manufactured on the $128^{\circ}YX-LiNbO_3$ substrate, and its process is addressed. Before manufacturing, the device is simulated using a commercial finite element program. The frequency responses of the saw sensor on the temperature change is measured. Since the center frequency on the temperature change from $-30^{\circ}C$ to $80^{\circ}C$ is linearly changed, the saw sensor is applicable to measure the temperature change or strain variation.

키워드

참고문헌

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