References
- Kumar, A. and Whitesides, G. M., 'Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ink followed by chemical etching,' Applied Physics Letters, Vol. 63, No. 14, pp. 2002-2004, 1993 https://doi.org/10.1063/1.110628
- Chou, S. Y., Krauss, P. R. and Renstrom, P. J., 'Nanoimprint lithography,' J. Vac. Sci. Technol. B, Vol. 14, No.6, pp. 4129-4133, 1996 https://doi.org/10.1116/1.588605
- Piner, R. D., Zhu, J., Xu, F., Hong, S. and Mirkin, C. A., 'Dip-pen nanolithography,' Science, Vol. 283, No. 29, pp. 661-663, 1999 https://doi.org/10.1126/science.283.5402.661
- Wilder, K., Quate, C. F., Adderton, D., Bernstein, R. and Elings, V., 'Noncontact nanolithography using the atomic force microscope,' Applied Physics Letters, Vol. 73, No. 17, pp. 2527-2529, 1998 https://doi.org/10.1063/1.122504
- Burger, G. J., Smulders, E. J. T., Berenschot, J. w., Lammerink, T. S. J., Fluitman, J. H. J. and Imai, S., 'High-resolution shadow-mask patterning in deep holes and its application to and electrical wafer feed-through,' Sensors and Actuators A, Vol. 54, pp. 669-673, 1996 https://doi.org/10.1016/S0924-4247(97)80035-0
- Brugger, J., Andreoli, C., Despont, M., Drechsler, U., Rothuizen, H. and Vettiger, P., 'Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices,' Sensors and Actuators A, Vol. 76, pp. 329-334, 1999 https://doi.org/10.1016/S0924-4247(98)00286-6
- Kim, G. M., Brugger, J., 'Fabrication of miniaturized shadow-mask for local deposition,' J. of the KSPE, Vol. 21, No.8, pp.152-156, 2004