Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Effect of an Initial Displacement on a Nano-guiding System

나노 가이드 시스템에서 초기 변위의 영향에 관한 연구

  • Published : 2006.04.01
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Abstract

This study shows that the system performance of a positioning system composed of a piezoelectric actuator-driven flexure guide depends largely on the preload applied on the flexure guide and the driving input amplitude. We used a flexure guided system that had an original resonant frequency of 54 Hz. Our experiment showed that we could increase the driving bandwidth above the original resonant frequency, for a case involving a large preload and a small input amplitude. Results show that there is a specific 'separation frequency' where the response of the moving mass of the flexure system decouples from the response of the piezoelectric actuator, and this specific separation frequency can be selected by a proper choice of the preload and the input amplitude. To find the separation frequency, sine sweep tests were performed. To confirm the increased system bandwidth frequency, open-loop sine tracking experiments were performed. Test results show that the system responds very well up to 130 Hz frequency higher than the original natural frequency (54 Hz).

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References

  1. Smith, S. T., 2003, Flexure: Eelements of Elastic Mechanisms, Taylor & Francis Corp, London
  2. Yoo, W. D., Kim, J. O. and Park, K. H., 2005, 'Development of a Contact-Type Counting Device Using a Piezoelectric Film as a Sensor,' Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 15, No.2, pp. 239-247 https://doi.org/10.5050/KSNVN.2005.15.2.239
  3. Wei Xu, Tim King, 1996, 'Flexure Hinges for Piezo Actuator Displacement Amplifiers, Flexibility, Accuracy and Stress Considerations,' Precision Engineering, Vol. 19, pp. 4-10 https://doi.org/10.1016/0141-6359(95)00056-9
  4. Ryu, J. W., Gweon, D. G. and Moon, K. S., 1997, 'Optimal Design of a Flexure Hinge Based XY Wafer Stage,' Precision Engineering, Vol. 21, pp. 18-28 https://doi.org/10.1016/S0141-6359(97)00064-0
  5. Ryu, J. W., Lee, S. Q., Gweon, D. G., Moon, K. S., 1999, 'Inverse Kinematic Modeling of a Coupled Flexure Hinge Mechanism,' Mechatronics, Vol. 9, pp. 657-674 https://doi.org/10.1016/S0957-4158(99)00006-9
  6. Lee, D.-Y. and Lee, M. Y, 2005, 'A Flexure Guided Planar Scanner for Scanning Probe Microscope; Part l: Design and Analysis of Static and Dynamic Properties,' Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 15, No.6, pp. 667-673 https://doi.org/10.5050/KSNVN.2005.15.6.667
  7. Lee, D. - Y., Lee, M. Y. and Gweon, D. G., 2006, 'Orthogonality Correction of Planar Sample Scanner for Atomic Force Microscope,' Japanese Journal of Applied Physics, Vol. 45, No. 13, pp. L370-L372 https://doi.org/10.1143/JJAP.45.L370
  8. Lee, D.-Y., Kim, D. M. and Gweon, D. G., 2006, 'Design and Evaluation of a Two-dimensional Metrological AFM Using a Planar Nano-scanner,' Japanese Journal of Applied Physics, Vol. 45, No. 3B, pp. 2124-2127 https://doi.org/10.1143/JJAP.45.2124