마이크로전자및패키징학회지 (Journal of the Microelectronics and Packaging Society)
- 제13권1호통권38호
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- Pages.37-42
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- 2006
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- 1226-9360(pISSN)
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- 2287-7525(eISSN)
Cross-Linked PVP 게이트 유기 박막트랜지스터
Organic Thin Film Transistors with Cross-Linked PVP Gates
- 장지근 (단국대학교 전자공학과) ;
- 오명환 (단국대학교 전자공학과) ;
- 장호정 (단국대학교 전자공학과) ;
- 김영섭 (단국대학교 전자공학과) ;
- 이준영 (단국대학교 전자공학과) ;
- 공명선 (단국대학교 화학과) ;
- 이영관 (성균관대학교 화학공학과)
- Jang Ji-Geun (Department of Electronics Engineering, Dankook University) ;
- Oh Myung-Hwan (Department of Electronics Engineering, Dankook University) ;
- Chang Ho-Jung (Department of Electronics Engineering, Dankook University) ;
- Kim Young-Seop (Department of Electronics Engineering, Dankook University) ;
- Lee Jun-Young (Department of Electronics Engineering, Dankook University) ;
- Gong Myoung-Seon (Department of Chemistry, Dankook University) ;
- Lee Young-Kwan (Department of Chemical Engineering, Sungkyunkwan University)
- 발행 : 2006.03.01
초록
유기 박막트랜지스터(OTFTs)제작에서 PVP-게이트 절연막의 형성과 처리가 소자성능에 미치는 영향을 조사하였다. 유기 게이트 용액의 제조에서는 polyvinyl 계열의 PVP(poly-4-vinylphenol)를 용질로, PGMEA (propylene glycol monomethyl ether acetate)를 용매로 사용하였다. 또한 열경화성 수지인 poly(melamine-co-formaldehyde)를 경화제로 사용하여 유기 절연막의 cross-link를 시도하였다. MIM 시료의 전기적 절연 특성을 측정한 결과, PVP-기반 유기 절연막은 용액의 제조에서 PGMEA에 대한 PVP와 poly (melamine-co-formaldehyde)의 농도를 증가시킬수록 낮은 누설전류 특성을 나타내었다. OTFT 제작에서는 PGMEA에 대해 PVP를 20 wt%로 섞은 PVP(20 wt%) copolymer와 5 wt%와 10 wt%의 poly(melamine-co-formaldehyde)를 경화제로 추가한 cross-linked PVP(20 wt%)를 게이트 유전 재료로 사용하였다. 제작된 트랜지스터들에서 전계효과 이동도는 5 wt % cross-linked PVP(20 wt%) 소자에서
The preparation and processing of PVP-gate insulators on the device performance have been studied in the fabrication of organic thin film transistors (OTFTs). One of polyvinyl series, poly-4-vinyl phenol(PVP) was used as a solute and propyleneglycol monomethyl etheracetate(PGMEA) as a solvent in the formation of organic gate solutions. The cross-linking of organic insulators was also attempted by adding the thermosetting material, poly (melamine-co-formaldehyde) as a hardener in the compounds. From the measurements of electrical insulating characteristics of metal-insulator-metal (MIM) samples, PVP-based insulating layers showed lower leakage current according to the increase of concentration of PVP and poly (melamine-co-formaldehyde) to PGMEA in the formation of organic solutions. The PVP(20 wt%) copolymer with composition of 20 wt% PVP to PGMEA and cross-linked PVPs in which 5 wt% and 10 wt% poly (melamine-co-formaldehyde) hardeners had been additional]y mixed into PVP(20 wt%) copolymers were used as gate dielectrics in the fabrication of OTFTs, respectively. In our experiments, the maximum field effect mobility of