Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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The Prediction of Etching Characteristics Using Spray Characteristics in Etching Process of Lead-Frame

Lead-Frame 에칭공정에서 분무특성을 이용한 에칭특성의 예측

  • 정흥철 (부산대학교 대학원 기계공학과) ;
  • 최경민 (부산대학교 기계공학부, 기계기술연구소) ;
  • 김덕줄 (부산대학교 기계공학부)
  • Published : 2006.04.01
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Abstract

The objective of this study is to predict the etching characteristics using spray characteristics for the optimization on the etching process of Lead-Frame. The etching characteristics such as etching factor, uniformity were investigated on the actual operating conditions. The correlation between the etching characteristics and the spray ones obtained by measurement were analyzed to simulate the etching characteristics according to actual conditions of lead-frame etching process. These conditions of lead-frame process were spray pressure, distance from nozzle tip to substrate, pipe pitch, and nozzle pitch. To improve the etching characteristics in the lead-frame process, effects of the various operating conditions should be understood in detail. The spray characteristics obtained by experiment using PDA system were simulated by the Monte-Carlo method. The etching process model was coded by Java language. It was found that simulation results generally agreed well with the measured results of etching characteristics in lead-frame etching process. The optimal operating parameters were successfully found under variable conditions.

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References

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