대한기계학회논문집B (Transactions of the Korean Society of Mechanical Engineers B)

  • 제30권4호
  • /
  • Pages.350-357
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  • 2006
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  • 1226-4881(pISSN)
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  • 2288-5324(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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압전식 구동기를 이용한 양방향 마이크로 펌프의 성능에 관한 연구

A Study on the Performance Characteristics of a New Bi-directional Micropump Using Piezoelectric Actuator

  • 최종원 (서울대학교 대학원 기계항공공학부) ;
  • 윤재성 (서울대학교 대학원 기계항공공학부) ;
  • 김민수 (서울대학교 기계항공공학부)
  • 발행 : 2006.04.01
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초록

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.

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참고문헌

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