나노 임프린팅 장비의 개발현황과 전망

  • 이재종 (한국기계연구원 지능형정밀기계연구본부) ;
  • 김두형 (한국기계연구원 지능형정밀기계연구본부) ;
  • 황경현 (한국기계연구원 지능형정밀기계연구본부)
  • 발행 : 2006.03.01

초록

키워드

참고문헌

  1. C. Schaefer, et al. 'State of the art automated nanoprinting of polymers and its challenges,' 7th International conference on the commercialization of micro and nano systems CMOS, Sep., 8-12, 2002
  2. B. Michel. et al. 'Printing meets lithography: soft approaches to high-resolution patterning', IBM, J. Res. & Dev., vol. 45, no. 5, Sep., 2001
  3. S.V. Sreenivasan, et al, 'Low-cost nanostructure patterning using step and flash imprint lithography,' NIST-SPIE Conference on Nanotechnology, Sep, 2001
  4. D. J. Resnick, et al, 'High resolution templates for step and flash imprinting lithography,' J. of Microlitho. Microieb. Microsyst. vol. 1, no. 3, Oct., 2002
  5. T. Haatainen, et al. 'Step and stamp imprint lithography using a commercial flip chip bonder,' Inter. NNT conference, Dec., 2002
  6. B. J. Choi, S. Johnson, M. Colburn, S. V. Sreenivasan and C. G. Willson, 1999, 'Design of Template Alignment Stages for Step & Flash Imprint Lithography,' Prof of ASPE 1999 Annual Meeting
  7. S. Y. Chou, et al. 'Imprint Lithography woth 8ub-10nm Feature Size and High Throughput', Microelectronics Engineering, No. 35, 1997