전자공학회논문지 IE

The Institute of Electronics and Information Engineers (대한전자공학회)
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The humidity sensitive characteristics of $CaZrO_3$ ceramics

$CaZrO_3$ 세라믹스의 감습 특성

  • Yuk, Jae-Ho (Department of Electrical Engineering, Yuhan College) ;
  • Kim, Yong-Woon (Department of Fire Safety Management, Saekyung College)
  • 육재호 (유한대학 전기정보과) ;
  • 김용운 (세경대학 소방안전관리과)
  • Published : 2006.09.25
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Abstract

[ $CaZrO_3$ ] humidity sensors were prepared using the solid-state synthetic method and their humidity sensitive characteristics have been investigated. It was found that the impedance of the humidity sensors decreased with increasing relative humidity and the humidity sensitivity depended on the applied frequencies. The sensitivity of sensor is stable with heat treatment and a negligible hysteresis under cyclic humidity changes is shown, and the activation energy for electrical conduction is reduced with water adsorption.

고상반응법을 이용하여 $CaZrO_3$ 습도센서를 제작하였으며 그의 감습특성에 대하여 연구하였다. 습도센서의 임피던스는 상대습도가 증가함에 따라 감소하며 감습도는 주파수에 의존하였다. 센서의 감습도는 열처리에 안정되고 흡습 탈습에 따른 히스테리시스 현상이 거의 나타나지 않았으며 전기전도 활성화에너지는 흡습에 따라 감소하였다.

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References

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