Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Microstructure and Magnetic Properties of Pulsed DC Magnetron Sputtered Zn0.8Co0.2O Film Deposited at Various Substrate Temperatures

증착온도를 달리하여 제조한 Zn0.8Co0.2O 박막의 미세조직 및 자기 특성

  • Kang, Young-Hun (Advanced Material Process of Information Technology, Sungkyunkwan University) ;
  • Kim, Bong-Seok (Advanced Material Process of Information Technology, Sungkyunkwan University) ;
  • Tai, Weon-Pil (Fine Chemical Industry Support Center, Ulsan Industry Promotion Techno Park) ;
  • Kim, Ki-Chul (Electronics and Telecommunications Research Institute) ;
  • Suh, Su-Jeung (Advanced Material Process of Information Technology, Sungkyunkwan University) ;
  • Park, Tae-Seok (Advanced Material Process of Information Technology, Sungkyunkwan University) ;
  • Kim, Young-Sung (Advanced Material Process of Information Technology, Sungkyunkwan University)
  • 강영훈 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터) ;
  • 김봉석 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터) ;
  • 태원필 (울산산업진흥테크노파크 정밀화학센터) ;
  • 김기출 (한국전자통신연구소) ;
  • 서수정 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터) ;
  • 박태석 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터) ;
  • 김용성 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터)
  • Published : 2006.02.01
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Abstract

We studied the microstructure and magnetic property of the pulsed DC magnetron sputtered $Zn_{\0.8}Co_{0.2}O$ film as a function of substrate temperatures. The X-ray patterns of the $Zn_{\0.8}Co_{0.2}O$ film showed a strong (002) preferential orientation at $500^{\circ}C$. The films with a crystallite size of 23-35 nm were grown in the form of nano-sized structure and this tendency was remarkable with increasing substrate temperature. The UV-visible result showed that the $Zn_{\0.8}Co_{0.2}O$ film prepared above $300^{\circ}C$ has a high optical transmittance of over $80\%$ in the visible region. The absorption bands were observed due to sp-d interchange action by $Co^{2+}$ complex ion and dd transition in the region from 500 to 700nm. The resistivity of the film was below $10^{-1}\;\Omega-cm\;above\;300^{\circ}C$. The AGM analysis results for the all films showed the magnetic hysteresis curves of ferromagnetic nature. The low electrical resistivity and room temperature ferromagnetism of ZnCoO thin films 'deposited above $300^{\circ}C$ suggested the possibility for the application to Diluted Magnetic Semiconductors (DMSs).

Keywords

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