Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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Modeling and Replication of Microlens Arrays Fabricated by a Modified LIGA Process

변형 LIGA 공정을 통해 제작된 마이크로 렌즈 어레이의 모델링 및 성형

  • 김동성 (포항공과대학교 기계공학과) ;
  • 이현섭 (포항공과대학교 기계공학과) ;
  • 이봉기 (포항공과대학교 기계공학과) ;
  • 양상식 (포항공과대학교 기계공학과) ;
  • 이승섭 (한국과학기술원 기계공학과) ;
  • 권태헌 (포항공과대학교 기계공학과)
  • Published : 2006.02.01
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Abstract

Microlens arrays were fabricated by a modified LIGA process composed of the exposure of a PMMA (Polymethylmethacrylate) sheet to deep x-rays and subsequent thermal treatment. A successful modeling and analyses for microlens formation were presented according to the experimental procedure. A nickel mold insert was fabricated by the nickel electroforming process on the PMMA microlens arrays fabricated by the modified LIGA process. For the replication of microlens arrays having various diameters with different foci on the same substrate, both hot embossing and microinjection molding processes have been successfully utilized with the fabricated mold insert. Replicated microlenses showed very good surface roughness with the order of 1 nm. The focal lengths of the injection molded microlenses were successfully estimated theoretically and also measured experimentally.

Keywords

References

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