Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Processing and Properties of RAINBOW Piezoelectric Actuator

RAINBOW 압전 액츄에이터의 제조와 물성

  • 백종후 (요업기술원 전자소재기술개발사업단) ;
  • 임은경 (요업기술원 전자소재기술개발사업단) ;
  • 김창일 (요업기술원 전자소재기술개발사업단) ;
  • 이미재 (요업기술원 전자소재기술개발사업단) ;
  • 지미정 (요업기술원 전자소재기술개발사업단) ;
  • 최병현 (요업기술원 전자소재기술개발사업단) ;
  • 김세기 (요업기술원 전자소재기술개발사업단)
  • Published : 2006.03.01
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Abstract

RAINBOW(Reduced And Internally Biased Oxide Wafers) are a new class of high-displacement, piezoelectric actuator produced by selectively removing oxygen from one surface of ceramic using a high-temperature chemical reduction process. In this paper, RAINBOW actuator materials of $0.4Pb(Ni_{1/3}Nb_{2/3})O_3-0.6Pb(Zr_{x}Ti_{1-x})O_3$ ceramics were prepared. Its dielectric and piezoelectric properties were investigated in the vicinity of MPB. The piezoelectric properties showed the maximum value of ${\epsilon}r$ = 4871, $d_{33}$ = 610 ($10^{-12}$ m/V), $d_{31}$ = -299 ($10^{-12}$ m/V), $k_{33}$ = $71\%$, Qm = 70, in $0.4Pb(Ni_{1/3}Nb_{2/3})O_{3}-0.6Pb(Zr_{405}Ti_{595})O_3$ composition sintered at $1250^{\circ}C$. The strain - electric field characteristics of RAINBOW actuator were significantly improved comparison with the conventional bulk actuator. The prepared RAINBOW actuator showed about $390\;{\mu}m/100\;V$ displacement.

Keywords

References

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