Journal of information and communication convergence engineering

  • 제4권4호
  • /
  • Pages.155-157
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  • 2006
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  • 2234-8255(pISSN)
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  • 2234-8883(eISSN)
한국정보통신학회 (The Korea Institute of Information and Commucation Engineering)
권호 표지

Effects of Thermal Treatment on the Characteristics of Spiral Inductors on Bragg Reflectors

  • Mai, Linh (School of Information and Communications University (ICU)) ;
  • Lee, Jae-Young (School of Information and Communications University (ICU)) ;
  • Le, Minh-Tuan (School of Information and Communications University (ICU)) ;
  • Pham, Van-Su (School of Information and Communications University (ICU)) ;
  • Yoon, Gi-Wan (School of Information and Communications University (ICU))
  • 발행 : 2006.12.30
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초록

This paper presents the thermal technique to improve characteristic of planar spiral inductors. The spiral inductors were fabricated on silicon dioxide/silicon (SiO2/Si) wafer. The thermal treatment was done by annealing processes. The measure results showed a considerable improvement of return loss (Sl1). This thermal treatment seems very promising for enhancing spiral inductors based RF IC's.

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참고문헌

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