Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Surface Properties of Polyimide Modified with He/O2/NF3 Atmospheric Pressure RF Dielectric Barrier Discharge

대기압 RF DBD 방전으로 개질된 폴리이미드의 표면특성

  • Lee, Su-Bin (Department of welding and production engineering, Hanbat National University) ;
  • Kim, Yoon-Kee (Department of welding and production engineering, Hanbat National University) ;
  • Kim, Jeong-Soon (Plasma Systems and Materials Inc.)
  • Published : 2006.09.27
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Abstract

Polyimides (PI) are treated with $He/O_2$ and $He/O_2/NF_3$ atmospheric pressure rf dielectric barrier discharge in order to investigate the roles of $NF_3$ that is one of the PI etching gases. Surface changes are analyzed by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and contact angle measurement. The surface roughness of PI and the ratio of C=O, which is hydrophilic functional group, is more increased by $He/O_2/NF_3$ discharge than by $He/O_2$ discharge. The C=O species on the PI surface is increased up to 30 percent with rf power. The surface roughness of PI is increased from 0.4 to 11 nm with rf power. The water drop contact angles on PI, however, are reduced from $65^{\circ}\;to\;9^{\circ}$ by plasma treatment independently of $NF_3$.

Keywords

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