Optimization of Glass Micro Molding Process for Glass Microlens Arrays

유리 마이크로 렌즈 어레이 성형을 위한 유리 마이크로 성형 공정 최적화

Glass micro molding process is the most suitable process for fabricating high precision glass microlens amy at low cost. A new glass micro molding process was proposed. Tungsten carbide mold was fabricated by imprinting and sintering process to overcome the difficulties of the conventional process. In the glass micro molding process, process conditions such as processing temperature and compression force were changed. Geometrical properties of the replicated glass microlens array were measured and compared at variety process conditions. The condition of glass micro molding process was optimized. The experimental result showed that developed process was effective to produce a glass microlens array.