Journal of Mechanical Science and Technology

The Korean Society of Mechanical Engineers (대한기계학회)
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Design of Microstereolithography System Based on Dynamic Image Projection for Fabrication of Three-Dimensional Microstructures

  • Cboi, Jae-Won (Department of Mechanical and Intelligent Systems Engineering, Pusan National University) ;
  • Ha, Young-Myoung (Department of Mechanical and Intelligent Systems Engineering, Pusan National University) ;
  • Lee, Seok-Hee (School of Mechanical Engineering, Pusan National University) ;
  • Choi, Kyung-Hyun (Department of Mechatronics Engineering, Cheju National University)
  • Published : 2006.12.01
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Abstract

As demands for complex microstructures with high aspect ratios have increased, the existing methods, MEMS and LIGA, have had difficulties coping with the number of masks and fabricable heights. A microstereolithography technology can meet these demands because it has no need of masks and is capable of fabricating high aspect ratio microstructures. In this technology, 3D part is fabricated by stacking layers, 2D sections, which are sliced from STL file, and the Dynamic Image Projection process enables the resin surface to be cured by a dynamic image generated with $DMD^{TM}$ (Digital Micromirror Device) and one irradiation. In this paper, we address optical design process for implementing this microstereolithography system that takes the light path based on DMD operation and image-formation on the resin surface using an optical design program into consideration. To verify the performance of this implemented microstereolithography system, complex 3D microstructures with high aspect ratios were fabricated.

Keywords

References

  1. Bertsch, A., Jezequel, J. Y. and Andre, J. C., 1997, 'Study of the Spatial Resolution of a New 3D Microfabrication Process: the Microstereophotolithography Using a Dynamic Mask-Generator Technique,' Journal of Photochemistry and Photobiology A : Chemistry 107, pp.275-281 https://doi.org/10.1016/S1010-6030(96)04585-6
  2. Bertsch, A., Bernhard, P., Vogt, C. and Renaud, P., 2000, 'Rapid Prototyping of Small Size Objects,' Rapid Prototyping Journal, Vol. 6, No.4, pp. 259-266 https://doi.org/10.1108/13552540010373362
  3. Bertsch, A., Jiguet, S. and Renaud, P., 2004, 'Micro fabrication of Ceramic Components by Microstereolithography,' Journal of Micromechanics and Microengineering, Vol. 14, pp. 197-203 https://doi.org/10.1088/0960-1317/14/2/005
  4. Choi, J. W., Ha, M. Y., Won, M. H., Choi, K. H. and Lee, S. H., 2005, 'Fabrication of 3-Dimensional Microstructures using Dynamic Image Projection,' Proceeding of the 1st International Conference on Precision Engineering and Micro/ Nano Technology in Asia, Shenzhen, China, pp. 472-476
  5. Farsari, M., Claret-Tournier, F., Huang, S., Chatwin, C. R., Budgett, D. M., Birch, P. M., Young, R. C. D. and Richardson, J. D., 2000, 'A Novel High-Accuracy Microstereolithography Method Employing an Adaptive Electro-optic Mask,' Journal of Materials Processing Technology 107, pp. 167-172 https://doi.org/10.1016/S0924-0136(00)00672-5
  6. Fischer, R. E. and Tadic-Galeb, B., 2000, Optical System Design, McGraw-Hill, pp. 35-47
  7. Ikuta, K. and Hirowatari, K., 1993, 'Real Three Dimensional Micro Fabrication Using Stereolithography and Metal Molding,' Proceedings of the 6th IEEE Workshop on Micro Electro Mechanical Systems (MEMS'93), pp.42-47
  8. Ikuta, K., Ogata, T., Tsuboi, M. and Kojima, S., 1996, 'Development of Mass Productive Micro Stereo Lithography,' Proceedings of the 8th IEEE Workshop on Micro Electro Mechanical Systems (MEMS'96), Piscataway, NJ, USA, pp. 301- 306 https://doi.org/10.1109/MEMSYS.1996.493998
  9. Ikuta, K., Maruo, S. and Kojima, S., 1998, 'New Micro Stereo Lithography for Freely Movable 3D Micro Structure - Super IH Process with Submicron Resolution,' Proceedings of the 11th IEEE Workshop on Micro Electro Mechanical Systems (MEMS'98), Heidelberg, Germany, pp.290-295 ？ https://doi.org/10.1109/MEMSYS.1998.659770
  10. Ikuta, K., Maruo, S., Fujisawa, T. and Yamada, A., 1999, 'Micro Concentrator with Opto-Sense Micro Reactor for Biochemical IC Chip Family - 3D Composite Structure and Experimental Verification,' Proceedings of the 12th IEEE Workshop on Micro Electro Mechanical Systems (MEMS '99), Orlando, Florida, USA, pp. 376-381
  11. Kim, D. S., Lee, I. H., Kwon, T. H. and Cho, D. W., 2005, 'Development of a Three-Dimensional Barrier Embedded Kenics Micromixer by Means of a Micro-Stereolithography Technology,' Journal of KSME A, Vol. 29, No.6, pp.904-912 https://doi.org/10.3795/KSME-A.2005.29.6.904
  12. Lee, I. H., Cho, Y. H., Cho, D. W. and Lee, E. S., 2004, 'Development of Micro-Stereolithography System for the Fabrication of ThreeDimensional Micro-Structures,' Journal of KSPE, Vol. 21, No.3, pp.171-179
  13. Lee, I. H. and Cho, D. W., 2004, 'An Investigation on Photopolymer Solidification Considering Laser Irradiation Energy in Micro-Stereolithography,' Microsystem Technologies, Vol. 10, No.8, pp. 592-598 https://doi.org/10.1007/s00542-003-0337-4
  14. Limaye, A. S., 2004, Design and Analysis of a Mask Projection Micro-Stereolithography System, M.S. Thesis, Georgia Institute of Technology
  15. Maruo, S., Ikuta, K. and Korogi, 2003, 'ForceControllable, Optically Driven Micromachines Fabricated by Single-Step Two-Photon Microstereolithography,' Journal of Microelectromechanical Systems, Vol. 12, No.5, pp. 533-539 https://doi.org/10.1109/JMEMS.2003.817894
  16. Oda, G., Miyoshi, T., Takaya, Y., Ha, T. H. and Kimura, K., 2004, 'Microfabrication of Overhanging Shape using LCD Microstereolithography,' 5th International Symposium on Laser Precision Microfabrication, Proceedings of SPIE, Vol. 5662, Bellingham, WA, pp. 649-654 https://doi.org/10.1117/12.596758
  17. Park, S. H., Lim, T. W. and Yang, D. W., 2005, 'Fabrication of Three-Dimensional Micro-Shell Structures Using Two-Photon Polymerization,' Journal of KSME A, Vol. 29, No.7, pp.998-1004 https://doi.org/10.3795/KSME-A.2005.29.7.998
  18. Park, S. H., Lim, T. W. and Yang, D. Y., 2006, 'Investigation into Direct Fabrication of N ano- Patterns Using N ano-Stereolithography ？(NSL) Process,' Journal of KSPE, Vol. 23, No. 3, pp. 156-162
  19. Provin, C. and Monneret, S., 2002, 'Complex Ceramic- Polymer Composite Microparts Made by Microstereolithography,' IEEE Transactions on Electronics Packaging Manufacturing, Vol. 25, No. 1, pp. 59-63 https://doi.org/10.1109/TEPM.2002.1000484
  20. Smith, L. B., 2004, Micro- Cross- Sectional Lithography$({\mu}CSL^{TM})$ : Prototyping and Packaging for MEMS, Ph. D. Thesis, Rensselaer Polytechnic Institute
  21. Sun, C. and Zhang, X., 2002, 'Experimental and Numerical Investigations on Microstereolithography of Ceramics,' Journal of Applied Phys？ics, Vol. 92, No.8, pp.4796-4802 https://doi.org/10.1063/1.1503410
  22. Sun, C., Fang, N., Wu, D. M. and Zhang, X., 2005, 'Projection Micro-Stereolithography Using Digital Micro-Mirror Dynamic Mask,' Sensors and Actuators A: Physical, Vol. 121, Issue 1, 31, pp. 113-120 https://doi.org/10.1016/j.sna.2004.12.011
  23. Varadan, V. K., Jiang, X. and Varadan, V. V., 2001, Microstereolithography and other Fabrication Techniques for 3D MEMS, Wiley
  24. Zhang, X., Jiang, X. N. and Sun, C., 1999, 'Micro-Stereo lithography of Polymeric and Ceramic Microstructures,' Sensors and Actuators 77, pp. 149-156 https://doi.org/10.1016/S0924-4247(99)00189-2