Zerodur의 초정밀 연삭 특성에 관한 연구

A Study on the Characteristics on Ultra-Precision Grinding of a Zerodur

We explored a new rough grinding technique on optics materials such as Zerodur. The facility used is a NANOFORM-600 diamond turning machine with a custom grinding module and a range of diamond resin bond wheel. The grinding parameters such as workpiece rotation speed, depth of cut and feed rate were altered while grinding the workpiece surfaces of 20mm in diameter. Surface roughness was measured by Form Talysurf series2. Our target is to define grinding conditions producing the surface roughness smaller than $0.2{\mu}m$ Ra.