Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)
- Volume 4 Issue 4
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- Pages.39-47
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- 2005
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- 1598-6721(pISSN)
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- 2288-0771(eISSN)
A High Power Micropump Using Active Check Valves Driven by Piezoelectric Actuators
압전구동 능동형 체크밸브를 이용한 고출력 마이크로펌프
Abstract
In this paper, a novel high power micropump using active check valves in place of conventional passive check valves employed at the inlet and outlet ports is presented. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. A prototype micropump having an effective size of
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