Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Measurement of Vacuum Pressure by Electron Emission from Carbon Nanotube Emitters

탄소나노튜브 전극으로부터 전자방출에 의한 진공도 측정

  • 김성진 (경남대학교 전자전기공학부) ;
  • 조규환 (경남대학교 전자전기공학부) ;
  • 김성엽 (경남대학교 전자전기공학부) ;
  • 전재옥 (경남대학교 전자전기공학부) ;
  • 이상훈 (경남대학교 전자전기공학부) ;
  • 최복길 (공주대학교 정보통신공학부)
  • Published : 2005.05.01
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Abstract

Carbon nanotubes (CNTs) have been well known as electron emitters for field emission applications like FEDs. In this work, we propose as new application a vacuum sensor using CNTs and discuss its current-voltage characteristics as a function of vacuum pressure. The proposed sensor, based on electrical discharge theories in air gap well-known as Townsend theory and as Paschen's law, works by figuring out the variation of the dark current and the initial breakdown voltage depending on the vacuum pressure of air which can ionize through collisions with the electrons accelerated by high electric field.

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References

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