Applied Microscopy

Korean Society of Microscopy (한국현미경학회)
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Theory of High Resolution TEM Image Formation: Coherence (1)

TEM 관련 이론해설 (6): 투과전자현미경의 고분해능 영상이론: 결맞음 (1)

  • Lee, Hwack-Joo (New Materials Evaluation Center, Korea Research Institute of Standards and Science)
  • 이확주 (한국표준과학연구원 물질량 표준연구부)
  • Published : 2005.09.01
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Abstract

In this review, the important ideas of coherence theory are introduced. The transfer function and damping envelopes of the microscope due to temporal and spatial coherence are described. The passbands and the condition of Scherzer focus are also disscussed in associated with the resolution of transmission electron microscope.

고분해능 TEM 영상 이론의 결맞음 조사에서의 결맞음에 관한 개념을 소개하였다. 현미경에서 부분 결맞음 파동으로 인한 transfer function과 envelope의 발생을 설명하고 현미경의 분해능과 관련된 passband와 Scherzer 초점 조건을 소개하였다.

Keywords

References

  1. Burge RE, Dainty JC, Thom J: The spatial coherence of electron beams. in Proc EMAG 1975, Bristol (ed. J. Venables) p. 221. Academic Press, London, 1975
  2. Fejes PL: Approximations for the calculation of high resolution eletron microscope images of thin films. Acta Crystallogr A33 : 109, 1977
  3. Frank J: The envelope of electron microscope transfer functions for partially coherent illumination. Optik 38 : 519, 1973
  4. Holmes SM, Cockayne DJH, Ray ILF: Coherence of field emission electron beam. In Proc 8th Int Congr Electron Microsc, Canberra, p. 290, 1974
  5. Hopkins HH: Application of coherence theory in microscopy and interferometry. J Opt Soc Am 47 : 508, 1957 https://doi.org/10.1364/JOSA.47.000508
  6. Humphreys CJ, Spence JCH: Resolution and illumination coherence in electron microscopy. Optik 58 : 125, 1981
  7. Nagata F, Matsuda T, Komoda T: High resolution electron microscopy by an incoherent illumination method. Japan J Appl Phys 14 : 1815, 1975 https://doi.org/10.1143/JJAP.14.1975
  8. O'Keefe MA, Sanders JV: n-beam lattice images. VI. Degradation of image resolution by a combination of incident beam divergence and spatial aberration. Acta Crystallogr A31 : 307, 1975
  9. Wade RH, Frank J: Electron microscope transfer functions for partially coherent axial illumination. Optik 49 : 81, 1977