한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제18권4호
  • /
  • Pages.381-385
  • /
  • 2005
  • /
  • 1226-7945(pISSN)
  • /
  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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Measurement of Ar Temperature of Hollow Cathode Discharge Plasma

  • Lee, Jun-Hoi (Department of Advanced Materials Science, Daejeon University) ;
  • Shin, Jae-Soo (Department of Advanced Materials Science, Daejeon University) ;
  • Lee, Sung-Jik (Department of Physics, Chungnam University) ;
  • Lee, Min-Soo (Applied Optics and Electromagnetic, Hannam University)
  • 발행 : 2005.04.01
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초록

The plasma temperature of Ar gas in hollow cathode discharge were measured. This is done by measuring the line profile of the 1s/sub 8/-2p/sub 8/ transition in Ar, using a single-frequency diode laser. Low power diode lasers have been successfully used for investigation of the line profiles of Ar transitions in hollow cathode discharges. It turns out that the plasma temperature of Ar is 640∼783 K in the discharge current range at 7∼10 mA.

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참고문헌

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