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태양전지 응용을 위한 PC 기판상의 ZnO:Al 박막 특성에 관한 연구

A Study on Properties of ZnO:Al Films on PC Substrate for Solar Cell Applications

  • 나영일 (군산대학교 전자정보공학부) ;
  • 이재형 (군산대학교 전자정보공학부) ;
  • 임동건 (충주대학교 전자공학과) ;
  • 양계준 (충주대학교 전자공학과)
  • 발행 : 2005.02.01

초록

Al doped ZnO thin films (ZnO:Al) were deposited on poly carbonate (PC) substrate by rf magnetron sputtering. In addition, the electrical, optical properties of the films prepared at various conditions were investigated. As the sputter power increased, the resistivity of ZnO:Al films decreased, regardless of substrate types. However, the resistivity of the films increased with the sputter pressure. The ZnO:Al films were increasingly dark gray colored as the sputter power increased, resulting in the loss of transmittance. High quality films with resistivity as low as 1.43${\times}$10$^{-4}$ Ω-cm and transmittance over 80 % have been obtained by suitably controlling the deposition parameters.

키워드

참고문헌

  1. B. H. Choi, 'Heat Treatment of RF Sputtered and Ga-doped Zinc Oxide Thin Films', KOSEF 913-0606-002-1, 1991
  2. S. Kumar and B. Drevillon, J. Appl. Phys., 65, 3023, 1989
  3. T. W. Choi and S. C. Yoo, 'Electrical and mechanical properties of ceramics', J. of KIEEME(in Korean), Vol. 15, No. 1, p. 10, 2001
  4. Wen-Fa Wu and Bi-Shou Chiou, 'Effect of annealing on electrical and optical properties of RF magnetron sputtered indium tin oxide films', Thin Solid Films, Vol. 247, p. 201, 1994

피인용 문헌

  1. Effects of Sputter Pressure on the Properties of Sputtered ZnO:Al Films Deposited on Plastic Substrate vol.22, pp.3, 2009, https://doi.org/10.4313/JKEM.2009.22.3.277