Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Characteristics of plasma polymerized para-xylene films as a passivation layer of organic light emitting diodes

  • Kho Sam il (Department of Physics, Brain Korea 21 Physics Research Division Institute of Basic Science, and Center for Nanotubes and Nanostructured Composites, Sungkyunkwan University) ;
  • Kim Min Su (Department of Physics, Brain Korea 21 Physics Research Division Institute of Basic Science, and Center for Nanotubes and Nanostructured Composites, Sungkyunkwan University) ;
  • Sohn Sun Young (Department of Physics, Brain Korea 21 Physics Research Division Institute of Basic Science, and Center for Nanotubes and Nanostructured Composites, Sungkyunkwan University) ;
  • Jung Dong Geun (Department of Physics, Brain Korea 21 Physics Research Division Institute of Basic Science, and Center for Nanotubes and Nanostructured Composites, Sungkyunkwan University) ;
  • Boo Jin Hyo (Department of Chemistry, Institute of Basic Science, and Brain Korea 21 Chemistry Research Division, Sungkyunkwan University) ;
  • Jeong Seong Hoon (Department of Chemistry, Institute of Basic Science, and Brain Korea 21 Chemistry Research Division, Sungkyunkwan University) ;
  • Park SangHee Ko (Basic Research Laboratory, Electronics and Telecommunication Research institute)
  • Published : 2005.12.01
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Abstract

For the longevity of OLEDs, passivation of OLEDs is an important process step since organic materials used in OLEDs are very vulnerable to moisture. In this work, the passivation effect of the plasma polymerized para-xylene (PP$\rho$X) layers was studied. The PPpX layers deposited by PECVD were formed on top of the cathode with various plasma powers of 50 - 90 W. Passivation effect of PP$\rho$X was significantly dependent upon the deposition plasma power of the PP$\rho$X film. The lifetime of OLEDs with the 70 W deposited PP$\rho$X passivation layer was about 5 times longer than that of the control device.

Keywords

References

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