KIEE International Transactions on Electrophysics and Applications

The Korean Institute of Electrical Engineers (대한전기학회)
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A Two-Step Micromirror for Low Voltage Operation

  • Hwang Yong-Ha (Department of Electrical Engineering, Korea University) ;
  • Han Seungoh (Department of Electrical Engineering, Korea University) ;
  • Lee Byung-Kab (Department of Electrical Engineering, Korea University) ;
  • Kim Jae-Soon (Department of Physics, Seoul National University) ;
  • Pak James Jungho (Department of Electrical Engineering, Korea University)
  • Published : 2005.12.01
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Abstract

In order for the application of the in-vivo endoscopic biopsy, a micromirror which can be driven at a low voltage is required. In this paper, a two-step micromirror composed of bottom electrodes, moving plate and top mirror plate is proposed. Because an electrical wiring of two plates are separated, they can be actuated separately. Therefore, an intermediate moving plate plays an important role in reducing the driving voltage in half. The designed device was fabricated by the surface micromachining. Maximum rotation angle of $6.3^{\circ}$ was obtained by applying DC 48V, while a conventional one-step mirror pulled down at DC 120V. The designed structure can be used in microphotonic applications requiring low driving voltage.

Keywords

References

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