Efficient Thermal Annealing for FBAR Devices

  • Song Hae-il (School of Engineering, Information and Communications University(ICU)) ;
  • Mai Linh (School of Engineering, Information and Communications University(ICU)) ;
  • Yoon Giwan (Information and Communications University(ICU))
  • Published : 2005.12.01

Abstract

In this paper, the resonance characteristics of SMR-type FBAR devices annealed by three different annealing methods are investigated and compared. The resonance characteristics could be effectively improved by the proposed efficient annealing method which optimizes the annealing conditions. It seems very useful for improving the performance of the SMR-type FBAR devices as a cost-effective way.

Keywords

References

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