Journal of information and communication convergence engineering

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Efficient Thermal Annealing for FBAR Devices

  • Song Hae-il (School of Engineering, Information and Communications University(ICU)) ;
  • Mai Linh (School of Engineering, Information and Communications University(ICU)) ;
  • Yoon Giwan (Information and Communications University(ICU))
  • Published : 2005.12.01
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Abstract

In this paper, the resonance characteristics of SMR-type FBAR devices annealed by three different annealing methods are investigated and compared. The resonance characteristics could be effectively improved by the proposed efficient annealing method which optimizes the annealing conditions. It seems very useful for improving the performance of the SMR-type FBAR devices as a cost-effective way.

Keywords

References

  1. Kenneth M, Lakin, Gerald R. Kline, and Kevin T. McCarron, 'Development of Miniature Filters for Wireless Applications', IEEE Transactions on Microwave Theory and Techniques, Vol. 43, No. 12, December 1995, pp.2933-2939 https://doi.org/10.1109/22.475658
  2. Motoaki Ham, Jan Kuypers, Takashi Abe and Masayoshi Esashi, 'MEMS Based Thin Film 2 GHz Resonator for CMOS Integration', 2003 IEEE MTT-S Digest, pp.1797-1800, 2003
  3. Jae Y. Park, Hee C. Lee, Kyeong H. Lee, Heon M. Lee, Young J. Ko, Jin H. Shin, Sun H. Moon, and Jong U. Bu, 'Micromachined FBAR RF Filter for Advanced Handset Applications', 2003IEEE int. conf. on solid state sensors, Actuators, and Microsystems, pp. 911-914, 2003
  4. Dong-Hyun Kim, Munhyuk Yim, Dongkyu Chai, and Giwan Yoon, 'Improvements of resonance characteristics due to thermal annealing of Bragg reflectors in ZnO-based FBAR devices', Electronics Letters, Vol.39, No.13, pp.962-964, June 26, 2003 https://doi.org/10.1049/el:20030638
  5. Munhyuk Yim, Dong-Hyun Kim, Dongkyu Chai, and Giwan Yoon, 'Significant resonance characteristic improvements by combined use of thermal annealing and Co electrode in ZnO-based FBARs', Electronics Letters, Vol. 39, No. 23, pp.1638-1639, Nov. 13, 2003 https://doi.org/10.1049/el:20031029
  6. Linh Mai, Mun-Hyuk Yim, Gi-Wan Yoon, and Dong-Hyun Kim, 'Dependence of Resonance Characteristic on Thermal annealing in ZnO-Based FBAR Devices', International Journal of KIMICS, Vol. 2, No.3, Sep. 2004
  7. Sang-Hyun Park, Byeng-Chul Seo, Hee-Dae Park, and Gi-wan Yoon, 'Film Bulk Acoustic Resonator Fabrication for Radio Frequency Filter Applications', Jpn. J. Appl. Phys. Vol. 39, pp. 4115-4119, 2000 https://doi.org/10.1143/JJAP.39.4115