References
- Sudarshan, T. and Bhat, D., 'Surface Modification Technologies,' Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 42, pp. 403-404,1989
- Klingenberg, M., Arps, J., Wei, R., Demaree, J. and Hirvonen, J., 'Practical Applications of Ion Beam and Plasma Processing for Improving Corrosion and Wear Protection,' Surface and Coatings Technology, Vol. 158, pp. 164-169,2002 https://doi.org/10.1016/S0257-8972(02)00194-9
- Bienk, J. and Mikkelsen, J., 'Application of Advanced Surface Treatment Technologies in Modern Plastic Moulding Industry,' Wear, Vol. 207, pp. 6-9,1997 https://doi.org/10.1016/S0043-1648(96)07503-5
- Jagielski, J., Piatkowska, A., Aubert, P., Legrand-Buscema, C., Le Paven, C., Gawlik G., Piekoszewski, J. and Werner, Z., 'Effects of High Dose Nitrogen Implantation into Aluminum,' Vacuum, Vol. 70, pp. 147-152,2003 https://doi.org/10.1016/S0042-207X(02)00633-4
- Burnel, S. and Datta, K., 'Surface Engineering Casebook,' Woodhead Publishing Limited, pp. 3-32, 1996
- Jaeger, R. C., 'Introduction to Microelectronic Fabrication,' Prentice Hall, pp. 91-120,2002
- Shim, Y. K., Kim, Y. K., Lee, K. H. and Han, S., 'The Properties of AlN Prepared by Plasma Nitriding and Plasma Source Ion Implantation Techniques,' Surface and Coatings Technology, Vol. 131, pp. 345-349,2000 https://doi.org/10.1016/S0257-8972(00)00807-0
- Kim, Y. S., Yang, J. C. and Kim. D. E., 'Effect of Film Thickness on the Tribological Characteristics of Zdol Lubricant on Silicon Surface,' International Journal of Precision Engineering and Manufacturing, Vol. 5, No.1, pp. 13-18,2004
- Fukumoto, S., Ando, M., Tsubakino. H., Terasawa, M., and Mitamura, T., 'Morphology of AIN formed in Aluminum by ion implantation,' Materials Chemistry and Physics, Vol. 54, pp. 351-355, 1998 https://doi.org/10.1016/S0254-0584(98)00027-3
- Sonnleitner, R., Hahn, K. and Rossi, F., 'Microstructure of Plasma Nitrided Layers on Aluminum,' Surface and Coatings Technology, Vol. 156, pp. 149-154,2002 https://doi.org/10.1016/S0257-8972(02)00119-6
- Hara, Y., Yamanishi, T., Azuma, K., Uchida, H. and Yatsuzuka, M., 'Microstructure of Al-alloy Surface Implanted with High-dose Nitrogen,' Surface and Coating Technology, Vol. 156, pp. 166-169,2002 https://doi.org/10.1016/S0257-8972(02)00123-8
- Tetsuji, Y., Yoshihito, H., Ryuhei, M., Kingo, A., Etsuo, F. and Mitsuyasu, Y., 'Profile of Implanted Nitrogen Ions in Al Alloy for Mold Materials,' Surface and Coatings Technology, Vol. 136, pp. 223-225,2001 https://doi.org/10.1016/S0257-8972(00)01018-5
- Guzmam, Z., Bonini, G., Adami, M., Ossi, P., Miotello, A., Antisari, M., Serventi, A. and Voltolini, E., 'Mechanical Behaviour of Nitrogen-Implanted Aluminum Alloys,' Surface and Coatings Technology, Vol. 83, pp. 284-289, 1996 https://doi.org/10.1016/0257-8972(95)02795-5
- Liao, J., Xia, L., Sun, M., Sun, Y., Liu, W., Xu, T. and Xue, Q., 'Tribological behavior of gradient modified layer on 2024 aluminum alloy Modified by Plasmabased Ion Implantation,' Wear, Vol. 256, pp. 840-845, 2004 https://doi.org/10.1016/S0043-1648(03)00521-0
- Youssef, A., Budzynski, P., Filiks, J. and Surowiec, Z., 'Improvement of Tribological Properties of Aluminum by Nitrogen Implantation,' Vacuum, 2005. (In press) https://doi.org/10.1016/j.vacuum.2005.01.093